Dr. Steven P. Kearney
R&D Mechanical Engineer at Argonne National Lab
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 14 September 2020 Presentation + Paper
Proc. SPIE. 11491, Advances in X-Ray/EUV Optics and Components XV
KEYWORDS: Mirrors, Sensors, In situ metrology, Adaptive optics, Control systems, Profilometers, Machine learning, Feedback control, Hard x-rays, Control systems design

Proceedings Article | 22 August 2020 Poster + Paper
Proc. SPIE. 11491, Advances in X-Ray/EUV Optics and Components XV
KEYWORDS: Mirrors, Sensors, Electrodes, Wavefront sensors, Wavefronts, Adaptive optics, Deformable mirrors, Zoom lenses, Prototyping

Proceedings Article | 9 September 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Diffraction, Monochromatic aberrations, Mirrors, Sensors, Crystals, X-rays, Wavefront sensors, Wavefronts, Adaptive optics, Optical alignment, Hard x-rays

Proceedings Article | 9 September 2019 Paper
Proc. SPIE. 11112, X-Ray Nanoimaging: Instruments and Methods IV
KEYWORDS: Microscopes, Mirrors, Microscopy, X-rays, X-ray microscopy, Nanoprobes, Finite element methods, Spatial resolution, Mechanical engineering, Hard x-rays

Proceedings Article | 30 August 2019 Presentation + Paper
Proc. SPIE. 11100, Optomechanical Engineering 2019
KEYWORDS: Optomechanical design, Metrology, Interferometers, Sensors, Error analysis, Nanoprobes, Tomography, Precision measurement, Optical alignment, Mechanical engineering

Showing 5 of 12 publications
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