Mr. Steven E. Steen Profile

Steven E. Steen

at ASML Netherlands BV

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Author

Publications (3)

Proceedings Article | 23 March 2020 Paper

How to improve overlay of highly deformed 3D NAND wafers

Michael Kubis, Jing Jin, Steven Steen, Johan Beckers, Fayaz Shaikh, Bart van Schravendijk

Proceedings Volume 11326, 113260M (2020) https://doi.org/10.1117/12.2552042

KEYWORDS: Semiconducting wafers, Overlay metrology, Scanners, Deposition processes, Optical alignment, Silicon, Atomic force microscopy, Lithography

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Proceedings Article | 6 May 2005 Paper

Looking into the crystal ball: future device learning using hybrid e-beam and optical lithography

S. Steen, S. McNab, L. Sekaric, I. Babich, J. Patel, J. Bucchignano, M. Rooks, D. Fried, A. Topol, J. Brancaccio, R. Yu, J. Hergenrother, J. Doyle, R. Nunes, R. Viswanathan, S. Purushothaman, M. Rothwell

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.600925

KEYWORDS: Lithography, Electron beam lithography, Optical alignment, Photoresist processing, Semiconducting wafers, Optical lithography, Etching, Metals, Semiconductors, Overlay metrology

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Proceedings Article | 11 April 2001 Paper

Timing high-speed microprocessor circuits using picosecond imaging circuit analysis

Steven Steen, Moyra McManus, Dennis Manzer

Proceedings Volume 4308, (2001) https://doi.org/10.1117/12.424998

KEYWORDS: Transistors, Picosecond phenomena, Switching, Metals, Microchannel plates, Analytical research, Silicon, Sensors, Image processing, Oxides

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