Dr. Lakshminarayanan Sujatha
Professor at Rajalakshmi Engineering College
SPIE Involvement:
Author
Area of Expertise:
MEMS , MEMS pressure sensors , Chemical sensors , MEMS actuators
Publications (6)

SPIE Journal Paper | 4 October 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Silicon, Microelectromechanical systems

SPIE Journal Paper | 25 September 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Silicon, Microelectromechanical systems, Actuators, Resistance, Connectors, Photomasks, Video, Semiconductors, Oxides, Electronics

Proceedings Article | 5 February 2010 Paper
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Composites, Silicon, Coating, Reliability, Picosecond phenomena, Self-assembled monolayers, Electrochemical etching

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Composites, Sensors, Picosecond phenomena, Silicon, Humidity, Crystals, Semiconducting wafers, Microelectromechanical systems, Scanning electron microscopy, Metals

Proceedings Article | 26 February 2008 Paper
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Microelectromechanical systems, Sensors, Metals, Crystals, Composites, Silicon, Scanning electron microscopy, Profilometers, Picosecond phenomena, Semiconducting wafers

Showing 5 of 6 publications
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