Ms. Sujeong Won Profile

Sujeong Won

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 20 November 2024 Poster + Paper

Automatic classification of EUV mask defects inspected using DUV inspection optics

Aravindh Rajiv, Samir Bhamidipati, Mark Pereira, Sankaranarayanan Paninjath, Neha Razdan, Stephen Kim, Jinhyuk Choi, Jonghoon Lim, Sujeong Won, Dongwook Lee, Woojin Kim, Jongha Park

Proceedings Volume 13216, 132162I (2024) https://doi.org/10.1117/12.3034707

KEYWORDS: Inspection, Extreme ultraviolet, Deep ultraviolet, Polarization, Image classification, Image processing

Read Abstract +

Proceedings Article | 10 April 2024 Poster + Paper

Wafer printability simulation of EUV mask defects using mask SEM and AFM

Donghwan Son, Lanpo He, Masaki Satake, Ying He, Kihun Park, Suhwan Kim, Jing Jiao, Peter Hu, Vikram Tolani, Kangjoon Seo, Kiwoo Jun, Heeyeon Jang, Sujeong Won, Bonseung Koo, Yongwook Lee, Sungha Woo, Euisang Park

Proceedings Volume 12955, 129552N (2024) https://doi.org/10.1117/12.3010196

KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Printing, Extreme ultraviolet, Atomic force microscopy, Contour extraction, Binary data, Data processing, Scanners, Extreme ultraviolet lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years