Suman Addya
at Univ of Delaware
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 March 2013 Paper
Proc. SPIE. 8624, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications VI
KEYWORDS: Lithography, Electron beam lithography, Titanium dioxide, Waveguides, Etching, Silicon, Modulators, Photonics, Photomasks, Optical alignment

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