Mr. Sumito Harada Profile

Sumito Harada

Applications Manager at Advantest Corp

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Publications (3)

Proceedings Article | 28 July 2014 Paper

Three dimensional profile measurement using multi-channel detector MVM-SEM

Makoto Yoshikawa, Sumito Harada, Keisuke Ito, Tsutomu Murakawa, Soichi Shida, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 9256, 92560G (2014) https://doi.org/10.1117/12.2064944

KEYWORDS: 3D metrology, Sensors, Atomic force microscopy, 3D image processing, Scanning electron microscopy, Algorithm development, Photomasks, Metrology, Transmission electron microscopy, Time metrology

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Proceedings Article | 2 April 2014 Paper

Novel three dimensional (3D) CD-SEM profile measurements

Wataru Ito, Benjamin Bunday, Sumito Harada, Aaron Cordes, Tsutomu Murakawa, Abraham Arceo, Makoto Yoshikawa, Toshihiko Hara, Takehito Arai, Soichi Shida, Masayuki Yamagata, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 9050, 90500D (2014) https://doi.org/10.1117/12.2047374

KEYWORDS: Atomic force microscopy, 3D image processing, 3D metrology, Sensors, Semiconducting wafers, Metrology, Reticles, Line edge roughness, Scanning electron microscopy

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Proceedings Article | 25 September 2010 Paper

A new CDSEM metrology method for thin film hardmasks patterns using multiple detectors

Sumito Harada, Yuta Chihara, Motoji Hirano, Toshi Iwai, Masayuki Kuribara, Ikuo Iko, Masahiro Seyama, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 7823, 78233H (2010) https://doi.org/10.1117/12.864171

KEYWORDS: Sensors, Thin films, Detection and tracking algorithms, Algorithm development, Metrology, Double patterning technology, Electron beams, Scanning electron microscopy, Photomasks, Binary data

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