Dr. Sunghoon Lee
Principal Researcher at Samsung Advanced Institute of Technology (SAIT)
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 September 2019 Paper
Chil-Sung Choi, Sung-Hoon Lee, Hoon Song, Jungkwuen An, Alexander Morozov, German Dubinin, Yunhee Kim, Young Kim, Kang-Hee Won, Yongkyu Kim, Myungjae Jeon, Bongsu Shin, Chang-Kun Lee, Wontaek Seo, Jae-Seung Chung, Juwon Seo, Yun-Tae Kim, Geeyoung Sung, Sunil Kim, Hong-Seok Lee
Proceedings Volume 11089, 1108902 (2019) https://doi.org/10.1117/12.2525214
KEYWORDS: Holography, Semiconducting wafers, Waveguides, Silicon, Diffraction gratings, Optical design, Nanoimprint lithography, Scanning electron microscopy, Diffraction, LCDs

Proceedings Article | 20 August 2015 Paper
Chil-Sung Choi, Alexander Morozov, Alexander Koshelev, Sergey Dubynin, German Dubinin, Sung-Hoon Lee, Jae-Seung Chung, Geeyoung Sung, Jungkwuen An, Hoon Song, Juwon Seo, Hojung Kim, Wontaek Seo, Andrey Putilin, Sergey Kopenkin, Yuriy Borodin, Sun Il Kim, Hong-Seok Lee, Joon-Yong Park, U-in Chung, Sungwoo Hwang
Proceedings Volume 9556, 955606 (2015) https://doi.org/10.1117/12.2186387
KEYWORDS: Holography, Waveguides, Collimation, Diffraction gratings, Photoresist materials, Diffraction, Mirrors, Scanning electron microscopy, Atomic force microscopy, Glasses

Proceedings Article | 17 December 2003 Paper
Mi-Young Kim, Won-Tai Ki, Sung-Hoon Lee, Ji-Hyeon Choi, Seong-Woon Choi, Jung-Min Sohn
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518028
KEYWORDS: Monte Carlo methods, Critical dimension metrology, Electron beam lithography, Photomasks, Modulation, Scattering, Error analysis, Vestigial sideband modulation, Cadmium, Chemically amplified resists

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top