Dr. Sung Koo Lee
Member of Technical Staff at Hynix Semiconductor Inc
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Semiconductors, Optical lithography, Etching, Inspection, Process control, Photoresist processing, Semiconducting wafers, Tolerancing, System on a chip, Factor analysis, Plasma

Proceedings Article | 18 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Image compression, Resistance, Inspection, Control systems, Electroluminescence, Photomasks, Nanoimprint lithography, Critical dimension metrology, Line edge roughness, Semiconducting wafers

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Optical lithography, Scattering, Etching, Photomasks, Chemical analysis, SRAF, Mask making, Critical dimension metrology, Stray light, Semiconducting wafers, Chemical mechanical planarization

Proceedings Article | 10 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Multilayers, Optical lithography, Etching, Interfaces, Silicon, Reflectivity, Control systems, Double patterning technology, Immersion lithography

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Optical lithography, Etching, Image processing, Coating, Scanning electron microscopy, Photoresist materials, Photomasks, Extreme ultraviolet, Double patterning technology

Showing 5 of 21 publications
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