Dr. Sungho Jang Profile

Dr. Sungho Jang

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 28 September 2023 Poster + Paper

Inverse optical design using quasi-two-dimensional partially coherent imaging for photolithography overlay metrology

Akinori Ohkubo, Sungho Jang, Jungchul Lee, Sangwoo Bae

Proceedings Volume 12664, 126640J (2023) https://doi.org/10.1117/12.2676094

KEYWORDS: Overlay metrology, Light sources and illumination, Reflection, Optical alignment, Coherence imaging, Monochromatic aberrations, Optical design, Matrices, Computer simulations, Nanoimprint lithography

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Proceedings Article | 1 August 2021 Presentation + Paper

Through-focus spot shaping with asymmetric pupil optimization for laser stealth dicing

Akinori Ohkubo, Sungho Jang, Youngchul Kwon, Deoksuk Jang, Jungchul Lee

Proceedings Volume 11818, 118180F (2021) https://doi.org/10.1117/12.2593641

KEYWORDS: Wavefront aberrations, Wafer dicing, Laser beam propagation, Optical filters, Semiconducting wafers, Silicon, Spatial light modulators, Beam shaping, Laser processing, Pulsed laser operation, Semiconductor lasers, Monochromatic aberrations, Modulation

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Proceedings Article | 20 August 2020 Poster + Paper

Signal-to-noise ratio evaluation for the nanometer-scale patterned defect inspection using dark-field microscopy with tailored polarization illumination

Akinori Ohkubo, Janghwi Lee, Hyungu Kim, Jiyoung Chu, Sungho Jang, Sangwoo Bae, Wondon Joo

Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116

KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry

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