Dr. Sungho Jang
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 28 September 2023 Poster + Paper
Proceedings Volume 12664, 126640J (2023) https://doi.org/10.1117/12.2676094
KEYWORDS: Overlay metrology, Light sources and illumination, Reflection, Optical alignment, Coherence imaging, Monochromatic aberrations, Optical design, Matrices, Computer simulations, Nanoimprint lithography

Proceedings Article | 1 August 2021 Presentation + Paper
Proceedings Volume 11818, 118180F (2021) https://doi.org/10.1117/12.2593641
KEYWORDS: Wavefront aberrations, Wafer dicing, Laser beam propagation, Optical filters, Semiconducting wafers, Silicon, Spatial light modulators, Beam shaping, Laser processing, Pulsed laser operation, Semiconductor lasers, Monochromatic aberrations, Modulation

Proceedings Article | 20 August 2020 Poster + Paper
Proceedings Volume 11485, 114850N (2020) https://doi.org/10.1117/12.2567116
KEYWORDS: Signal to noise ratio, Polarization, Scattering, Near field, Cameras, Semiconducting wafers, Ellipsometry

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