Mr. Sunglim Park Profile

Sunglim Park

at KAIST

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Publications (7)

Proceedings Article | 4 October 2001 Paper

3D image reconstruction using optical sectioning in confocal scanning microscopy

Jungwoo Seo, Dong Kyun Kang, Sunglim Park, Dae gab Gweon

Proceedings Volume 4564, (2001) https://doi.org/10.1117/12.444112

KEYWORDS: Confocal microscopy, Adaptive optics, Microscopy, Sensors, Image enhancement, Objectives, Image quality, Mirrors, Signal detection, Microscopes

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Confocal scanning microscopy (CSM) has been used in biological application, materials science, semiconductor quality measurement and other non-destructive microscopic application. Small spot of light illuminates a sample, and a small detector that is ideally a point detector collects the reflected or transmitted light having the information of specimen. An image distribution can be reconstructed by a correlation analysis of spots with the high bandwidth. The mechanism for two-dimensional beam scanning and optical sectioning has an important role in CSM as the three-dimensional profiler. The parasitic motion of focus on the detector gives rise to the fatal distortion of an image profile named the extinction effect while using acousto-optical (AO) deflector. The intensity profile for the open loop scanning should be matched with its response for the standard. The non-linearity can be minimized with the optical sectioning or the optical probe of the closed loop control. This paper shows the mathematical expression of the light such as the extinction curve in the optical fields of system using AO deflector, the axial/lateral response experimentally when the error sources change, and the methods of optical sectioning. We propose the progressive methods for the high quality image as the following. At first, for having the corrected image, small spot and long scan range, this paper shows that the optimal design having the multi-objects can be used by choosing the unitary lens device in CSM. At second, in order to compensate for the intensity cancellation at the end profile that may be the cause of waviness for the optical image, this paper shows that it is efficient to schedule the frequency of scan. According to characteristics of the extinction curve and axial/lateral response having the error property, we can define the frequency and sensitivity of as their robustness. Finally, the axial response gives an important motive for the optical section, and the limit of object depth. The edge enhancement may be a fatal defeat to the reconstruction of image and sensitive to the conditions of specimen such as slope, irregular reflectivity, shape, etc. That means that the intensity profile for the open loop scanning method should be matched with its response to a perfect mirror as specimen, which can be minimized with the optical sectioning or the optical probe of the closed loop control.

Proceedings Article | 4 October 2001 Paper

Auto-alignment for incident angle of ellipsometer

Sunglim Park, Jaewha Jung, Jeongwoo Seo, Dong Kyun Kang, Dae gab Gweon

Proceedings Volume 4564, (2001) https://doi.org/10.1117/12.444104

KEYWORDS: Sensors, Signal detection, Algorithm development, Polarizers, Signal processing, Detection and tracking algorithms, Optical alignment, Manufacturing, Polarizing prisms, 3D modeling

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Proceedings Article | 12 February 2001 Paper

Design and fabrication of near-field microscope using solid immersion lens

Hyoung Kil Yoon, Sunglim Park, Jun Hee Lee, Jungwoo Seo, Dae gab Gweon

Proceedings Volume 4190, (2001) https://doi.org/10.1117/12.417219

KEYWORDS: Microscopes, Head, Objectives, Solids, Photography, Near field, Near field optics, Scanning electron microscopy, Refractive index, Resolution enhancement technologies

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Proceedings Article | 12 February 2001 Paper

Optimal rejection of the image extinction in confocal scanning microscopy

Jungwoo Seo, Sunglim Park, Leejun Hee, Hyoung Kil Yoon, Dae gab Gweon

Proceedings Volume 4190, (2001) https://doi.org/10.1117/12.417234

KEYWORDS: Confocal microscopy, Adaptive optics, Sensors, Signal detection, Microscopy, Objectives, Diffraction, Refractive index, Signal attenuation, Optical components

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Proceedings Article | 12 February 2001 Paper

Analysis of error and development of calibration's method to design precision rotating analyzer ellipsometer

HyeonOk Gil, Sunglim Park, Jaewha Jung, Dae gab Gweon

Proceedings Volume 4190, (2001) https://doi.org/10.1117/12.417215

KEYWORDS: Error analysis, Calibration, Manufacturing, Opto mechatronics, Optical resolution, Optical calibration, Optical components

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Proceedings Article | 12 February 2001 Paper

Novel precision mechanical design for ellipsometer

Sunglim Park, Jaewha Jung, HyeonOk Gil, Dae gab Gweon

Proceedings Volume 4190, (2001) https://doi.org/10.1117/12.417220

KEYWORDS: Signal detection, Light sources, Sensors, Polarizers, Manufacturing, Optical alignment, Kinematics, Mechanical engineering, Error analysis, Modulators

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Proceedings Article | 7 May 1999 Paper

Improved phase unwrapping of a phase-shift interferometer using a precision XY-scanner

Sunglim Park, Dae gab Gweon, Kee Moon

Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347772

KEYWORDS: Charge-coupled devices, Interferometers, Sensors, Phase shifts, CCD image sensors, Detection and tracking algorithms, Phase interferometry, Mechanical engineering, Spatial frequencies, Modulation transfer functions

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Showing 5 of 7 publications

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