Dr. Suraj Patil Profile

Dr. Suraj Patil

at SAMSUNG Austin Semiconductor LLC

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Publications (1)

Proceedings Article | 20 March 2020 Presentation + Paper

Using e-Beam inspection and overlay as tool for identifying process weaknesses in semiconductor processing

Kwame Owusu-Boahen, Suraj Patil, Arun Vijayakumar, Alex Pate, Carl Han, Jorg Schwitzgebel, Chulwoo Kim, David Moreau

Proceedings Volume 11325, 113251V (2020) https://doi.org/10.1117/12.2551656

KEYWORDS: Semiconducting wafers, Inspection, Overlay metrology, Semiconductor manufacturing, Transmission electron microscopy, Manufacturing, Defect detection, Wafer testing, Semiconductors, Lithography

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