Dr. Susanne Arney Profile

Dr. Susanne Arney

Senior Director Enabling Physical Technologies Res at Nokia Bell Labs

SPIE Involvement:

Author | Instructor

Proceedings Article | 8 February 2008 Paper

Closed-loop AO demonstration of MEMS SLM with piston, tip and tilt control

Harold Dyson, Flavio Pardo, Roland Ryf, Vladimir Aksyuk, Robert Frahm, Arman Gasparyan, Rick Papazian, David Ramsey, Maria Elina Simon, Susanne Arney

Proceedings Volume 6888, 68880T (2008) https://doi.org/10.1117/12.770432

KEYWORDS: Spatial light modulators, Adaptive optics, Point spread functions, Microelectromechanical systems, Cameras, Control systems, Electronics, Wavefront sensors, Prototyping, Actuators

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Proceedings Article | 24 April 2003 Paper

Optical MEMS devices for telecom systems

Flavio Pardo, Vladimir Aksyuk, Susanne Arney, H. Bair, Nagesh Basavanhally, David Bishop, Gregory Bogart, Cristian Bolle, J. Bower, Dustin Carr, H. Chan, Raymond Cirelli, E. Ferry, Robert Frahm, Arman Gasparyan, John Gates, C. Randy Giles, L. Gomez, Suresh Goyal, Dennis Greywall, Martin Haueis, R. Keller, Jungsang Kim, Fred Klemens, Paul Kolodner, Avi Kornblit, T. Kroupenkine, Warren Lai, Victor Lifton, Jian Liu, Yee Low, William Mansfield, Dan Marom, John Miner, David Neilson, Mark Paczkowski, C. Pai, A. Ramirez, David Ramsey, S. Rogers, Roland Ryf, Ronald Scotti, Herbert Shea, M. Simon, H. Soh, Hong Tang, J. Taylor, K. Teffeau, Joseph Vuillemin, J. Weld

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499075

KEYWORDS: Mirrors, Electrodes, Silicon, Microelectromechanical systems, Switches, Reflectors, Semiconducting wafers, Microopto electromechanical systems, Oxides, Optical fabrication equipment

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Proceedings Article | 21 November 2001 Paper

Enabling MEMS technologies for communications systems

Victor Lubecke, Bradley Barber, Susanne Arney

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448975

KEYWORDS: Microelectromechanical systems, Resonators, Mars, Acoustics, Inductance, Telecommunications, Modulators, Mirrors, Silicon, Metals

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Proceedings Article | 2 October 2001 Paper

Design for reliability of MEMS/MOEMS for lightwave telecommunications

Susanne Arney, Vladimir Aksyuk, David Bishop, Cristian Bolle, Robert Frahm, Arman Gasparyan, C. Randy Giles, Suresh Goyal, Flavio Pardo, Herbert Shea, Michael Lin, Carolyn White

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.442996

KEYWORDS: Microopto electromechanical systems, Reliability, Microelectromechanical systems, Packaging, Telecommunications, Networks, Silicon, Physics, Mechanical engineering, Feedback loops

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Proceedings Article | 22 August 2000 Paper

Lucent Microstar micromirror array technology for large optical crossconnects

Vladimir Aksyuk, Flavio Pardo, Cristian Bolle, Susanne Arney, C. Randy Giles, David Bishop

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396503

KEYWORDS: Mirrors, Electrodes, Reflectors, Micromirrors, Silicon, Singular optics, Single mode fibers, Switching, Free space, Free space optics

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Proceedings Article | 10 August 2000 Paper

Mechanical reliability of surface-micromachined self-assembling two-axis MEMS tilting mirrors

Arman Gasparyan, Vladimir Aksyuk, Paul Busch, Susanne Arney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395696

KEYWORDS: Micromirrors, Mirrors, Reliability, Microelectromechanical systems, Doppler effect, Electrodes, Motion measurement, Signal detection, Switching, Interferometry

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Proceedings Article | 10 August 2000 Paper

Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages

Herbert Shea, Arman Gasparyan, Carolyn White, Robert Comizzoli, David Abusch-Magder, Susanne Arney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395700

KEYWORDS: Electrodes, Humidity, Silicon, Microelectromechanical systems, Reliability, Oxides, Etching, Scanning electron microscopy, HF etching, Oxidation

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Proceedings Article | 10 August 2000 Paper

Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures

Carolyn White, Herbert Shea, Kimberly Cameron, Flavio Pardo, Cristian Bolle, Vladimir Aksyuk, Susanne Arney

Proceedings Volume 4180, (2000) https://doi.org/10.1117/12.395697

KEYWORDS: Resistance, Microelectromechanical systems, Reliability, Humidity, Environmental sensing, Environmental monitoring, Thin films, Electrical breakdown, Electrical phenomena, Semiconducting wafers

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Showing 5 of 8 publications

Conference Committee Involvement (15)

MOEMS and Miniaturized Systems XI

24 January 2012 | San Francisco, California, United States

MOEMS and Miniaturized Systems X

24 January 2011 | San Francisco, California, United States

MOEMS and Miniaturized Systems IX

25 January 2010 | San Francisco, California, United States

MOEMS and Miniaturized Systems VIII

27 January 2009 | San Jose, California, United States

MOEMS and Miniaturized Systems VII

22 January 2008 | San Jose, California, United States

MOEMS and Miniaturized Systems VI

24 January 2007 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

23 January 2007 | San Jose, California, United States

MOEMS Display, Imaging, and Miniaturized Microsystems IV

25 January 2006 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

25 January 2006 | San Jose, California, United States

MOEMS and Miniaturized Systems V

25 January 2005 | San Jose, California, United States

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

25 January 2005 | San Jose, California, United States

MOEMS and Miniaturized Systems IV

27 January 2004 | San Jose, California, United States

Reliability, Testing, and Characterization of MEMS/MOEMS III

26 January 2004 | San Jose, California, United States

MOEMS and Miniaturized Systems III

27 January 2003 | San Jose, CA, United States

Reliability, Testing, and Characterization of MEMS/MOEMS II

27 January 2003 | San Jose, CA, United States

Showing 5 of 15 Conference Committees

Course Instructor

SC434: Designing MEMS for Reliability

This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.

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