Dr. Sven Burger Profile

Dr. Sven Burger

at Zuse Institute Berlin

SPIE Involvement:

Conference Program Committee | Author

Websites:

Company Website

Publications (90)

Proceedings Article | 23 August 2023 Presentation + Paper

Forward simulation of coherent beams on grating structures for coherent scatterometry

Martin Hammerschmidt, Lin Zschiedrich, Lauryna Siaudinyté, Phillip Manley, Philipp-Immanuel Schneider, Sven Burger

Proceedings Volume PC12619, PC1261907 (2023) https://doi.org/10.1117/12.2673231

KEYWORDS: Light sources and illumination, Physical coherence, Scatterometry, Sampling rates, Laser scattering, Optical gratings, Systems modeling, Interpolation, Gaussian beams, Finite element methods

Read Abstract +

Proceedings Article | 23 August 2023 Presentation

Efficient reconstruction of model parameters using Bayesian target-vector optimization

Matthias Plock, Sven Burger, Philipp-Immanuel Schneider

Proceedings Volume PC12619, PC1261905 (2023) https://doi.org/10.1117/12.2673590

KEYWORDS: Mathematical optimization, Optical metrology, Monte Carlo methods, Education and training, Process modeling, Sand, Global Positioning System, Computer programming languages

Read Abstract +

Proceedings Article | 31 May 2023 Poster + Paper

Applying a Riesz-projection-based contour integral eigenvalue solver to compute resonance modes of a VCSEL

Lilli Kuen, Fridtjof Betz, Felix Binkowski, Philipp-Immanuel Schneider, Martin Hammerschmidt, Niels Heermeier, Sven Rodt, Stephan Reitzenstein, Sven Burger

Proceedings Volume 12575, 125750J (2023) https://doi.org/10.1117/12.2665490

KEYWORDS: Vertical cavity surface emitting lasers, Simulations, Scattering, Finite element methods, Numerical simulations, Eigenvectors, Quantum Eigensolver

Read Abstract +

Proceedings Article | 8 March 2023 Presentation + Paper

Nanostructures for in-situ surface-enhanced Kretschmann-Raether ellipsometry

D. Mukherjee, B. Kalas, S. Burger, G. Sáfrán, M. Serényi, M. Fried, P. Petrik

Proceedings Volume 12428, 124280S (2023) https://doi.org/10.1117/12.2649080

KEYWORDS: Silver, Aluminum, Plasmonics, Nanostructures, Interfaces, Gold, Metals, Silicon, Ellipsometry, Optical properties

Read Abstract +

Proceedings Article | 3 October 2022 Presentation

Boosting quantum optics experiments with Bayesian optimization (Conference Presentation)

Philipp-Immanuel Schneider, Lin Zschiedrich, Martin Hammerschmidt, Lilli Kuen, Ivan Sekulic, Julien Kluge, Bastian Leykauf, Markus Krutzik, Sven Burger

Proceedings Volume 12227, 122270F (2022) https://doi.org/10.1117/12.2632419

KEYWORDS: Quantum optics, Stochastic processes, Performance modeling, Optimization (mathematics)

Read Abstract +

Proceedings Article | 20 May 2022 Paper

Reconstructing phase aberrations for high-precision dimensional microscopy

Philipp-Immanuel Schneider, Phillip Manley, Jan Krüger, Lin Zschiedrich, Rainer Köning, Bernd Bodermann, Sven Burger

Proceedings Volume 12137, 121370I (2022) https://doi.org/10.1117/12.2620762

KEYWORDS: Microscopes, Finite element methods, Microscopy, Data modeling, Image processing, Dimension reduction, Process modeling, Model-based design

Read Abstract +

Proceedings Article | 1 August 2021 Presentation

Deterministically fabricated quantum dot – waveguide systems for on-chip quantum optics

Peter Schnauber, Johannes Schall, Samir Bounouar, Kartik Srinivasan, Marcelo Davanco, Jin-Dong Song, Sven Burger, Sven Rodt, Stephan Reitzenstein

Proceedings Volume 11806, 118060G (2021) https://doi.org/10.1117/12.2596042

Read Abstract +

Proceedings Article | 20 June 2021 Presentation + Paper

Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology

Matthias Plock, Sven Burger, Philipp-Immanuel Schneider

Proceedings Volume 11783, 117830J (2021) https://doi.org/10.1117/12.2592266

Read Abstract +

Proceedings Article | 2 August 2019 Presentation

Numerical optimization of resonant photonic devices (Conference Presentation)

Martin Hammerschmidt, Lin Zschiedrich, Philipp-Immanuel Schneider, Felix Binkowski, Sven Burger

Proceedings Volume 11057, 1105702 (2019) https://doi.org/10.1117/12.2534348

Read Abstract +

Proceedings Article | 21 June 2019 Presentation + Paper

Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction

Anna Andrle, Philipp Hönicke, Philipp Schneider, Yves Kayser, Martin Hammerschmidt, Sven Burger, Frank Scholze, Burkhard Beckhoff, Victor Soltwisch

Proceedings Volume 11057, 110570M (2019) https://doi.org/10.1117/12.2526082

KEYWORDS: Luminescence, Nanostructures, Particle swarm optimization, Silicon, Optimization (mathematics), X-rays, X-ray fluorescence spectroscopy, Finite element methods, Oxides, Sensors

Read Abstract +

Proceedings Article | 26 March 2019 Paper

Using Gaussian process regression for efficient parameter reconstruction

Philipp-Immanuel Schneider, Martin Hammerschmidt, Lin Zschiedrich, Sven Burger

Proceedings Volume 10959, 1095911 (2019) https://doi.org/10.1117/12.2513268

KEYWORDS: Optimization (mathematics), Computer simulations, Inverse optics, Finite element methods, Stochastic processes, Scatterometry, Scattering, Inverse problems, Reconstruction algorithms, Scatter measurement

Read Abstract +

Proceedings Article | 26 September 2018 Presentation + Paper

Using effective medium theories to design tailored nanocomposite materials for optical systems

Daniel Werdehausen, Isabelle Staude, Sven Burger, Jörg Petschulat, Toralf Scharf, Thomas Pertsch, Manuel Decker

Proceedings Volume 10745, 107450H (2018) https://doi.org/10.1117/12.2320525

KEYWORDS: Nanocomposites, Particles, Refractive index, Scattering, Nanoparticles, Optical properties, Composites, Magnetism, Optical design, Mie scattering

Read Abstract +

Proceedings Article | 18 September 2018 Presentation

Optimization of nanostructured high efficiency perovskite/c-Si tandem solar cells via numerical simulation (Conference Presentation)

Phillip Manley, Klaus Jäger, Philipp Tockhorn, Sven Burger, Steve Albrecht, Christiane Becker

Proceedings Volume 10731, 107310B (2018) https://doi.org/10.1117/12.2321240

KEYWORDS: Nanostructuring, Tandem solar cells, Numerical simulations, Perovskite, Thin films, Absorption, Optical simulations, Nanostructured thin films, Thin film solar cells, Silicon

Read Abstract +

Proceedings Article | 28 May 2018 Paper

Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization

Martin Hammerschmidt, Philipp-Immanuel Schneider, Xavier Garcia Santiago, Lin Zschiedrich, Martin Weiser, Sven Burger

Proceedings Volume 10694, 1069407 (2018) https://doi.org/10.1117/12.2315468

KEYWORDS: Inverse problems, Finite element methods, Optimization (mathematics), Silicon, Metrology, Inverse optics, Stochastic processes, Optical design, Diffractive optical elements, Scatterometry

Read Abstract +

Proceedings Article | 22 May 2018 Presentation + Paper

Antireflective nanotextures for monolithic perovskite-silicon tandem solar cells

Klaus Jäger, Phillip Manley, Duote Chen, Philipp Tockhorn, David Eisenhauer, Grit Köppel, Martin Hammerschmidt, Sven Burger, Steve Albrecht, Christiane Becker

Proceedings Volume 10688, 106880A (2018) https://doi.org/10.1117/12.2306142

KEYWORDS: Silicon, Absorption, Perovskite, Finite element methods, Solar cells, Tandem solar cells, Antireflective coatings, Reflectivity

Read Abstract +

Proceedings Article | 17 May 2018 Paper

Modelling of standard and specialty fibre-based systems using finite element methods

Natascia Castagna, Jacques Morel, Luc Testa, Sven Burger

Proceedings Volume 10683, 1068336 (2018) https://doi.org/10.1117/12.2307372

KEYWORDS: Finite element methods, Modeling, Multimode fibers, Waveguides, Single mode fibers, Optical fibers, Photonic crystal fibers

Read Abstract +

Proceedings Article | 17 May 2018 Presentation + Paper

Online measurement of optical fibre geometry during manufacturing

Maksim Shpak, Sven Burger, Ville Byman, Kimmo Saastamoinen, Mertsi Haapalainen, Antti Lassila

Proceedings Volume 10683, 1068318 (2018) https://doi.org/10.1117/12.2314762

KEYWORDS: Coating, Sensors, Optical fibers, Modeling, Scattering, Polymers, Optical testing, Manufacturing

Read Abstract +

Proceedings Article | 9 May 2018 Paper

Validation of quasi-normal modes and of constant-flux modes for computing fundamental resonances of VCSELs

Theresa Hoehne, Lin Zschiedrich, Nasibeh Haghighi, James Lott, Sven Burger

Proceedings Volume 10682, 106821U (2018) https://doi.org/10.1117/12.2307200

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Finite element methods, Computer simulations, Near field optics, Maxwell's equations, 3D modeling

Read Abstract +

Proceedings Article | 4 May 2018 Paper

Benchmarking state-of-the-art numerical simulation techniques for analyzing large photonic crystal membrane line defect cavities

Niels Gregersen, Jakob Rosenkrantz de Lasson, Lars Hagedorn Frandsen, Philipp Gutsche, Sven Burger, Oleksiy S. Kim, Olav Breinbjerg, Aliaksandra Ivinskaya, Fengwen Wang, Ole Sigmund, Teppo Häyrynen, Andrei V. Lavrinenko

Proceedings Volume 10672, 106721C (2018) https://doi.org/10.1117/12.2304338

KEYWORDS: Photonic crystals, Finite-difference time-domain method, Finite element methods, Numerical simulations, Optical microcavities, Integrated optics, Scattering, Numerical analysis

Read Abstract +

SPIE Journal Paper | 30 March 2018 Open Access

Nanophotonic light management for perovskite–silicon tandem solar cells

Duote Chen, Phillip Manley, Philipp Tockhorn, David Eisenhauer, Grit Köppel, Martin Hammerschmidt, Sven Burger, Steve Albrecht, Christiane Becker, Klaus Jäger

JPE, Vol. 8, Issue 02, 022601, (March 2018) https://doi.org/10.1117/12.10.1117/1.JPE.8.022601

KEYWORDS: Perovskite, Tandem solar cells, Solar cells, Silicon, Absorption, Nanophotonics, Finite element methods, Computer architecture, Fourier transforms, Crystals

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 21 February 2018 Paper

Efficient finite-element-based numerical modelling of large sub-wavelength patterned optical structures

Martin Hammerschmidt, Jakub Pabisiak, Ana Cristina Perez-Gea, Nicholas Julian, Sean Hon, Sven Burger

Proceedings Volume 10542, 105421G (2018) https://doi.org/10.1117/12.2292438

KEYWORDS: Scattering, Finite element methods, Reflectivity, Numerical analysis, Optical filters, Cavity resonators, Electronic filtering, Computer simulations, Numerical modeling

Read Abstract +

Proceedings Article | 30 August 2017 Presentation + Paper

Optical simulations of advanced light management for liquid-phase crystallized silicon thin-film solar cells

Klaus Jäger, Grit Köppel, David Eisenhauer, Duote Chen, Martin Hammerschmidt, Sven Burger, Christiane Becker

Proceedings Volume 10356, 103560F (2017) https://doi.org/10.1117/12.2273994

KEYWORDS: Solar cells, Finite element methods, Silicon films, Silicon, Nanolithography, Refractive index, Nanoimprint lithography, Optical simulations

Read Abstract +

Proceedings Article | 26 June 2017 Paper

Global optimization of complex optical structures using Bayesian optimization based on Gaussian processes

Philipp-Immanuel Schneider, Xavier Garcia Santiago, Carsten Rockstuhl, Sven Burger

Proceedings Volume 10335, 103350O (2017) https://doi.org/10.1117/12.2270609

KEYWORDS: Finite element methods, Nano optics, Nanophotonics, Computer simulations, Electromagnetism, Metrology, Computational lithography, Optical properties, Maxwell's equations, Diffraction, Reflectivity, Optimization (mathematics), Stochastic processes, Numerical simulations, Optics manufacturing, Statistical analysis, 3D acquisition, Machine learning

Read Abstract +

Proceedings Article | 26 June 2017 Paper

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Martin Hammerschmidt, Martin Weiser, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven Burger

Proceedings Volume 10330, 1033004 (2017) https://doi.org/10.1117/12.2270596

KEYWORDS: Metrology, Optical metrology, Maxwell's equations, Light scattering, Computational lithography, Nanolithography, Finite element methods, Nano optics, Critical dimension metrology, Scattering, Uncertainty analysis, Inverse optics, Scatterometry, Silicon, Inverse problems, Oxides, Polarization

Read Abstract +

Proceedings Article | 29 April 2016 Paper

Sinusoidal gratings for optimized light management in c-Si thin-film solar cells

Klaus Jäger, Grit Köppel, Carlo Barth, Martin Hammerschmidt, Sven Herrmann, Sven Burger, Frank Schmidt, Christiane Becker

Proceedings Volume 9898, 989808 (2016) https://doi.org/10.1117/12.2225459

KEYWORDS: Silicon, Thin film solar cells, Solar cells, Thin films, Antireflective coatings, Diffraction gratings, Numerical simulations, Finite element methods, Thin film solar cells, Refractive index, Interfaces, Polarization, Maxwell's equations, Absorption

Read Abstract +

Proceedings Article | 14 March 2016 Paper

Reconstruction of photonic crystal geometries using a reduced basis method for nonlinear outputs

Martin Hammerschmidt, Carlo Barth, Jan Pomplun, Sven Burger, Christiane Becker, Frank Schmidt

Proceedings Volume 9756, 97561R (2016) https://doi.org/10.1117/12.2212482

KEYWORDS: Photonic crystals, Electromagnetism, Finite element methods, Chemical elements, Electroluminescent displays, Silicon, Reflectivity, Solids, Resonance enhancement, Electromagnetic scattering

Read Abstract +

Proceedings Article | 14 March 2016 Paper

Time-harmonic optical chirality in inhomogeneous space

Philipp Gutsche, Lisa Poulikakos, Martin Hammerschmidt, Sven Burger, Frank Schmidt

Proceedings Volume 9756, 97560X (2016) https://doi.org/10.1117/12.2209551

KEYWORDS: Polarization, Interfaces, Electromagnetism, Electroluminescent displays, Radio propagation, Magnetism, Wave propagation, Integrated optics, Finite element methods, Anisotropy

Read Abstract +

Proceedings Article | 8 March 2016 Paper

Method for fast computation of angular light scattering spectra from 2D periodic arrays

Jan Pomplun, Sven Burger, Lin Zschiedrich, Philipp Gutsche, Frank Schmidt

Proceedings Volume 9778, 977839 (2016) https://doi.org/10.1117/12.2219666

KEYWORDS: Finite element methods, Electromagnetism, Computer simulations, Optical metrology, Semiconductors, Light scattering, 3D metrology, Scatterometry, Computational lithography, Numerical analysis, Silicon, Scattering, Polarization, Metrology, Maxwell's equations, Computing systems

Read Abstract +

Proceedings Article | 4 March 2016 Paper

Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures

Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 9742, 97420M (2016) https://doi.org/10.1117/12.2212367

KEYWORDS: Maxwell equations, Transistors, Modeling, Nanostructures, Finite element methods, Optical components, Photonics, Optical properties, Error analysis, Electroluminescent displays, Maxwell's equations, Electromagnetic scattering, Fourier transforms, Computer simulations

Read Abstract +

Proceedings Article | 4 March 2016 Paper

Direct visualization of the in-plane leakage of high-order transverse modes in vertical-cavity surface-emitting lasers mediated by oxide-aperture engineering

N. Ledentsov, V. Shchukin, J.-R. Kropp, S. Burger, F. Schmidt

Proceedings Volume 9766, 976608 (2016) https://doi.org/10.1117/12.2208909

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Visualization, Modulation, Electroluminescence, 3D modeling, Data modeling, Zinc, CCD cameras, Neodymium, Ions

Read Abstract +

Proceedings Article | 23 September 2015 Paper

Hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures

Sven Burger, Philipp Gutsche, Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Frank Schmidt, Benjamin Wohlfeil, Lin Zschiedrich

Proceedings Volume 9630, 96300S (2015) https://doi.org/10.1117/12.2190119

KEYWORDS: Finite element methods, Electromagnetism, Absorption, Interfaces, Optical components, Maxwell's equations, Optical design, 3D equipment, Visualization, Transparent conductors

Read Abstract +

Proceedings Article | 23 September 2015 Paper

Reduced basis method for Maxwell's equations with resonance phenomena

Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Lin Zschiedrich, Sven Burger, Frank Schmidt

Proceedings Volume 9630, 96300R (2015) https://doi.org/10.1117/12.2190425

KEYWORDS: Error analysis, Electroluminescent displays, Chemical elements, Maxwell's equations, Finite element methods, Nanophotonics, Instrument modeling, Photonic crystals, Silicon, Resonance enhancement

Read Abstract +

Proceedings Article | 20 August 2015 Presentation + Paper

Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing

Emil Agocs, Bernd Bodermann, Sven Burger, Gaoliang Dai, Johannes Endres, Poul-Erik Hansen, Lars Nielson, Morten Madsen, Sebastian Heidenreich, Michael Krumrey, Bernd Loechel, Juergen Probst, Frank Scholze, Victor Soltwisch, Matthias Wurm

Proceedings Volume 9556, 955610 (2015) https://doi.org/10.1117/12.2190409

KEYWORDS: Scatterometry, Silicon, Standards development, Scanning electron microscopy, Atomic force microscopy, Manufacturing, Calibration, Metrology, Critical dimension metrology, X-rays

Read Abstract +

Proceedings Article | 20 March 2015 Paper

Engineering of optical modes in vertical-cavity microresonators by aperture placement: applications to single-mode and near-field lasers

V. Shchukin, N. Ledentsov, J.-R. Kropp, G. Steinle, K. Choquette, S. Burger, F. Schmidt

Proceedings Volume 9381, 93810V (2015) https://doi.org/10.1117/12.2077012

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Near field optics, Near field, Refractive index, 3D modeling, Waveguides, Reflectivity, Resistance, Semiconductors

Read Abstract +

Proceedings Article | 19 March 2015 Paper

Hp-finite element method for simulating light scattering from complex 3D structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Sven Herrmann, Frank Schmidt

Proceedings Volume 9424, 94240Z (2015) https://doi.org/10.1117/12.2085795

KEYWORDS: Light scattering, Finite element methods, Roentgenium, 3D metrology, Electromagnetism, Discretization errors, Optical metrology, Metrology, Silicon

Read Abstract +

Proceedings Article | 4 March 2015 Paper

High-speed modulation, wavelength, and mode control in vertical-cavity surface-emitting lasers

Nikolay Ledentsov, Jörg-R. Kropp, Vitaly Shchukin, Gunther Steinle, Jarek Turkiewicz, Bo Wu, Shaofeng Qiu, Yanan Ma, Zhiyong Feng, Sven Burger, Frank Schmidt, Christoph Caspar, Ronald Freund, Kent Choquette

Proceedings Volume 9381, 93810F (2015) https://doi.org/10.1117/12.2082951

KEYWORDS: Vertical cavity surface emitting lasers, Modulation, Oxides, Optical fibers, Multimode fibers, Dielectrics, Electro optics, Dispersion, Photonic crystals, Near field

Read Abstract +

Proceedings Article | 17 October 2014 Paper

Determination of line profiles on photomasks using DUV, EUV, and x-ray scattering

F. Scholze, B. Bodermann, S. Burger, J. Endres, A. Haase, M. Krumrey, C. Laubis, V. Soltwisch, A. Ullrich, J. Wernecke

Proceedings Volume 9231, 92310M (2014) https://doi.org/10.1117/12.2065941

KEYWORDS: Extreme ultraviolet, Deep ultraviolet, Scatterometry, Diffraction, X-rays, Diffraction gratings, Scattering, Photomasks, Polarization, Finite element methods

Read Abstract +

Proceedings Article | 30 September 2014 Paper

Determination of line profiles on nano-structured surfaces using EUV and x-ray scattering

Victor Soltwisch, Jan Wernecke, Anton Haase, Jürgen Probst, Max Schoengen, Michael Krumrey, Frank Scholze, Jan Pomplun, Sven Burger

Proceedings Volume 9235, 92351D (2014) https://doi.org/10.1117/12.2066165

KEYWORDS: Scattering, Diffraction, X-rays, Extreme ultraviolet, Laser scattering, Silicon, Reflectivity, Finite element methods, Sensors, Scatterometry

Read Abstract +

Proceedings Article | 8 March 2014 Paper

Numerical simulation of grating couplers for mode multiplexed systems

Benjamin Wohlfeil, Sven Burger, Christos Stamatiadis, Jan Pomplun, Frank Schmidt, Lars Zimmermann, Klaus Petermann

Proceedings Volume 8988, 89880K (2014) https://doi.org/10.1117/12.2044461

KEYWORDS: Waveguides, Waveguide modes, Polarization, 3D modeling, Optical design, Light scattering, Numerical simulations, Multiplexing, Computer simulations, Scattering

Read Abstract +

Proceedings Article | 7 March 2014 Paper

Adaptive sampling strategies for efficient parameter scans in nano-photonic device simulations

Martin Hammerschmidt, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 8980, 89801O (2014) https://doi.org/10.1117/12.2036363

KEYWORDS: 3D modeling, Solar cells, Error analysis, MATLAB, Finite element methods, Chemical elements, Nanophotonics, Metrology, Scattering, Device simulation

Read Abstract +

Proceedings Article | 9 October 2013 Paper

Finite-element based electromagnetic field simulations: benchmark results for isolated structures

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 8880, 88801Z (2013) https://doi.org/10.1117/12.2026213

KEYWORDS: Finite element methods, Electromagnetism, Computer simulations, Metrology, Stanford Linear Collider, Silver, Near field, Sensors, Numerical analysis, Chemical elements

Read Abstract +

Proceedings Article | 25 September 2013 Paper

Nanophotonic light trapping in polycrystalline silicon thin-film solar cells using periodically nanoimprint-structured glass substrates

Christiane Becker, Jolly Xavier, Veit Preidel, Philippe Wyss, Tobias Sontheimer, Bernd Rech, Jürgen Probst, Christoph Hülsen, Bernd Löchel, Alexei Erko, Sven Burger, Frank Schmidt, Franziska Back, Eveline Rudigier-Voigt

Proceedings Volume 8824, 88240D (2013) https://doi.org/10.1117/12.2023871

KEYWORDS: Silicon, Absorption, Glasses, Crystals, Nanophotonics, Silicon films, Thin film solar cells, Sol-gels, Solids, Solar cells

Read Abstract +

Proceedings Article | 13 May 2013 Paper

Investigation of microstructured fiber geometries by scatterometry

Poul-Erik Hansen, Sven Burger

Proceedings Volume 8789, 87890R (2013) https://doi.org/10.1117/12.2020526

KEYWORDS: Light scattering, Cladding, Scatterometry, Microscopes, Sensors, Structured optical fibers, Photonic crystal fibers, Finite element methods, Polarization, Diffraction

Read Abstract +

Proceedings Article | 13 May 2013 Paper

Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle

Victor Soltwisch, Sven Burger, Frank Scholze

Proceedings Volume 8789, 878905 (2013) https://doi.org/10.1117/12.2020487

KEYWORDS: Scattering, Scatterometry, Extreme ultraviolet, Diffraction, Reflectivity, Photomasks, Finite element methods, Metrology, Critical dimension metrology, Lithography

Read Abstract +

Proceedings Article | 13 May 2013 Paper

Numerical investigations of the influence of different commonly applied approximations in scatterometry

J. Endres, S. Burger, M. Wurm, B. Bodermann

Proceedings Volume 8789, 878904 (2013) https://doi.org/10.1117/12.2022108

KEYWORDS: Diffraction, Gaussian beams, Diffraction gratings, Scatterometry, Scattering, Scatter measurement, Modeling, Light scattering, Laser scattering, Nanostructures

Read Abstract +

Proceedings Article | 10 April 2013 Paper

Fast simulation method for parameter reconstruction in optical metrology

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Bernd Bodermann

Proceedings Volume 8681, 868119 (2013) https://doi.org/10.1117/12.2011154

KEYWORDS: Computer simulations, Light scattering, Optical metrology, Scatterometry, Electromagnetism, Finite element methods, Near field, Critical dimension metrology, Scattering, Statistical modeling

Read Abstract +

Proceedings Article | 25 March 2013 Paper

FEM-based optical modeling of silicon thin-film tandem solar cells with randomly textured interfaces in 3D

Martin Hammerschmidt, Daniel Lockau, Sven Burger, Frank Schmidt, Christoph Schwanke, Simon Kirner, Sonya Calnan, Bernd Stannowski, Bernd Rech

Proceedings Volume 8620, 86201H (2013) https://doi.org/10.1117/12.2001789

KEYWORDS: Monte Carlo methods, Absorption, Interfaces, Solar cells, Chemical elements, 3D modeling, Computer simulations, Transparent conductors, Finite element methods, Prisms

Read Abstract +

Proceedings Article | 6 March 2013 Paper

Efficient design of photonic integrated circuits (PICs) by combining device- and circuit- level simulation tools

C. Arellano, S. Mingaleev, I. Koltchanov, A. Richter, J. Pomplun, S. Burger, F. Schmidt

Proceedings Volume 8627, 862711 (2013) https://doi.org/10.1117/12.2004378

KEYWORDS: Photonic integrated circuits, Device simulation, Waveguides, Finite element methods, Chemical elements, Instrument modeling, 3D modeling, Integrated circuit design, Integrated optics, Ions

Read Abstract +

Proceedings Article | 5 March 2013 Paper

Advanced finite-element methods for design and analysis of nanooptical structures: applications

Sven Burger, Lin Zschiedrich, Jan Pomplun, Mark Blome, Frank Schmidt

Proceedings Volume 8642, 864205 (2013) https://doi.org/10.1117/12.2001094

KEYWORDS: Finite element methods, Photonic crystal fibers, Plasmonics, Photonic crystals, Solar cells, Optical simulations, Nano optics, Integrated optics, Computer simulations, Photomasks

Read Abstract +

Proceedings Article | 4 March 2013 Paper

Numerical analysis of nanostructures for enhanced light extraction from OLEDs

Lin Zschiedrich, Horst Greiner, Sven Burger, Frank Schmidt

Proceedings Volume 8641, 86410B (2013) https://doi.org/10.1117/12.2001132

KEYWORDS: Organic light emitting diodes, Finite element methods, Einsteinium, Nanostructures, Maxwell's equations, Numerical analysis, OLED lighting, Computer simulations, Photonic crystals, Light emitting diodes

Read Abstract +

Proceedings Article | 25 October 2012 Paper

First steps towards a scatterometry reference standard

Bernd Bodermann, Poul-Erik Hansen, Sven Burger, Mark-Alexander Henn, Hermann Gross, Markus Bär, Frank Scholze, Johannes Endres, Matthias Wurm

Proceedings Volume 8466, 84660E (2012) https://doi.org/10.1117/12.929903

KEYWORDS: Scatterometry, Metrology, Standards development, Scatter measurement, Scanning electron microscopy, Atomic force microscopy, Data analysis, Calibration, Diffraction, Modeling

Read Abstract +

Proceedings Article | 13 March 2012 Paper

Finite element models of lithographic mask topography

Jacek Tyminski, Raluca Popescu, Sven Burger, Jan Pomplun, Lin Zschiedrich, Tomoyuki Matsuyama, Tomoya Noda

Proceedings Volume 8326, 83261B (2012) https://doi.org/10.1117/12.916957

KEYWORDS: Finite element methods, Photomasks, Near field, Fiber optic illuminators, Scanners, Stanford Linear Collider, Image acquisition, Lithography, Semiconducting wafers, Computer simulations

Read Abstract +

Proceedings Article | 28 February 2012 Paper

3D finite element simulation of optical modes in VCSELs

Maria Rozova, Jan Pomplun, Lin Zschiedrich, Frank Schmidt, Sven Burger

Proceedings Volume 8255, 82550K (2012) https://doi.org/10.1117/12.906372

KEYWORDS: Vertical cavity surface emitting lasers, Finite element methods, 3D modeling, Chemical elements, Computer simulations, Optical simulations, Visualization, Thermal effects, Optical components, Maxwell's equations

Read Abstract +

Proceedings Article | 28 February 2012 Paper

Thermo-optical simulation of high-power diode lasers

Jan Pomplun, Hans Wenzel, Sven Burger, Lin Zschiedrich, Maria Rozova, Frank Schmidt, Paul Crump, Hossein Ekhteraei, Christoph Schultz, Götz Erbert

Proceedings Volume 8255, 825510 (2012) https://doi.org/10.1117/12.909330

KEYWORDS: Semiconductor lasers, High power lasers, Refractive index, Optical simulations, Thermal effects, Chemical elements, Maxwell's equations, Thermal blooming, Electro optical modeling, Thermal modeling

Read Abstract +

Proceedings Article | 21 February 2012 Paper

Combining nanooptical fields and coherent spectroscopy on systems with delocalized excitons

Felix Schlosser, Mario Schoth, Kirankumar Hiremath, Sven Burger, Frank Schmidt, Andreas Knorr, Shaul Mukamel, Marten Richter

Proceedings Volume 8260, 82601V (2012) https://doi.org/10.1117/12.906671

KEYWORDS: Quantum dots, Spectroscopy, Excitons, Polarization, Metals, Nanoplasmonics, Silver, Nanostructures, Field spectroscopy, Waveguides

Read Abstract +

Proceedings Article | 14 October 2011 Paper

Investigation of 3D patterns on EUV masks by means of scatterometry and comparison to numerical simulations

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Akiko Kato, Christian Laubis, Frank Scholze

Proceedings Volume 8166, 81661Q (2011) https://doi.org/10.1117/12.896839

KEYWORDS: Extreme ultraviolet, Diffraction, Photomasks, Scatterometry, Computer simulations, Numerical simulations, Multilayers, Sensors, 3D metrology, Extreme ultraviolet lithography

Read Abstract +

Proceedings Article | 23 May 2011 Paper

Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness

Bernd Kleemann, Julian Kurz, Jochen Hetzler, Jan Pomplun, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8083, 808309 (2011) https://doi.org/10.1117/12.889364

KEYWORDS: Finite element methods, Diffraction, Maxwell's equations, Error analysis, Diffraction gratings, Inverse scattering, Scattering, Electromagnetism, Electromagnetic scattering, Polarization

Read Abstract +

Proceedings Article | 23 May 2011 Paper

Reduced basis method for real-time inverse scatterometry

Jan Pomplun, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 8083, 808308 (2011) https://doi.org/10.1117/12.889892

KEYWORDS: Scatterometry, Extreme ultraviolet, Error analysis, Data modeling, Diffraction, Chemical elements, Computer simulations, Finite element methods, Maxwell's equations, Reliability

Read Abstract +

Proceedings Article | 23 May 2011 Paper

Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 8083, 80831B (2011) https://doi.org/10.1117/12.889831

KEYWORDS: Diffraction, Extreme ultraviolet, Photomasks, Computer simulations, Light scattering, Mirrors, Finite element methods, Near field, Extreme ultraviolet lithography, 3D metrology

Read Abstract +

Proceedings Article | 21 February 2011 Paper

Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures

Daniel Lockau, Lin Zschiedrich, Sven Burger, Frank Schmidt, Florian Ruske, Bernd Rech

Proceedings Volume 7933, 79330M (2011) https://doi.org/10.1117/12.874967

KEYWORDS: Monte Carlo methods, Silicon, Absorption, Transparent conductors, Interfaces, Solar cells, Glasses, Chemical elements, Silicon films, Optical simulations

Read Abstract +

Proceedings Article | 21 February 2011 Paper

Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap

Sven Burger, Jan Pomplun, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 7933, 79330T (2011) https://doi.org/10.1117/12.875044

KEYWORDS: Computer simulations, Finite element methods, Nickel, Optical microcavities, Waveguides, Waveguide modes, Modulation, Photonic nanostructures, Dielectrics, Photonic crystals

Read Abstract +

Proceedings Article | 17 January 2011 Paper

Fast online simulation of 3D nanophotonic structures by the reduced basis method

Frank Schmidt, Jan Pomplun, Lin Zschiedrich, Sven Burger

Proceedings Volume 7941, 79410G (2011) https://doi.org/10.1117/12.874726

KEYWORDS: Computer simulations, Photomasks, Chemical elements, Nanophotonics, Optical metrology, Optical lithography, Optical proximity correction, 3D modeling, Source mask optimization, Inverse problems

Read Abstract +

Proceedings Article | 25 September 2010 Paper

Reduced basis method for source mask optimization

Jan Pomplun, Lin Zschiedrich, Sven Burger, Frank Schmidt, Jacek Tyminski, Donis Flagello, Nakashima Toshiharu

Proceedings Volume 7823, 78230E (2010) https://doi.org/10.1117/12.866101

KEYWORDS: Source mask optimization, Chemical elements, Photomasks, Error analysis, Optimization (mathematics), Near field, Lithography, Maxwell's equations, Semiconducting wafers, Reliability

Read Abstract +

Proceedings Article | 24 February 2010 Paper

Numerical investigation of photonic crystal microcavities in silicon-on-insulator waveguides

Sven Burger, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 7609, 76091Q (2010) https://doi.org/10.1117/12.841867

KEYWORDS: Waveguides, Optical microcavities, Photonic crystals, Finite element methods, Computer simulations, Silicon, Light scattering, Resonators, Light wave propagation, Silica

Read Abstract +

Proceedings Article | 17 February 2010 Paper

Numerical investigation of optical resonances in circular grating resonators

Sven Burger, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 7606, 760610 (2010) https://doi.org/10.1117/12.842061

KEYWORDS: Resonators, Waveguides, Silicon, Waveguide modes, Chemical elements, Finite element methods, Nickel, Optical properties, Integrated photonics, Switching

Read Abstract +

Proceedings Article | 12 February 2010 Paper

Finite element method for accurate 3D simulation of plasmonic waveguides

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt

Proceedings Volume 7604, 76040F (2010) https://doi.org/10.1117/12.841995

KEYWORDS: Plasmonic waveguides, Waveguides, Light wave propagation, Finite element methods, Computer simulations, Silver, Visualization, Magnesium fluoride, Resonators, Nanowires

Read Abstract +

Proceedings Article | 23 September 2009 Paper

Reduced basis method for computational lithography

Jan Pomplun, Lin Zschiedrich, Sven Burger, Frank Schmidt

Proceedings Volume 7488, 74882B (2009) https://doi.org/10.1117/12.829639

KEYWORDS: Error analysis, Chemical elements, Optical proximity correction, Photomasks, Computational lithography, Reliability, Semiconducting wafers, Near field, Computer simulations, Scatterometry

Read Abstract +

Proceedings Article | 18 June 2009 Paper

Comparison of electromagnetic field solvers for the 3D analysis of plasmonic nanoantennas

Johannes Hoffmann, Christian Hafner, Patrick Leidenberger, Jan Hesselbarth, Sven Burger

Proceedings Volume 7390, 73900J (2009) https://doi.org/10.1117/12.828036

KEYWORDS: Optical spheres, Chemical elements, Finite element methods, Plasmonics, Electromagnetism, Microwave radiation, Finite-difference time-domain method, Magnetism, Visualization, MATLAB

Read Abstract +

Proceedings Article | 17 June 2009 Paper

3D finite-element simulations of enhanced light transmission through arrays of holes in metal films

Sven Burger, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Benjamin Kettner, Daniel Lockau

Proceedings Volume 7390, 73900H (2009) https://doi.org/10.1117/12.827543

KEYWORDS: Finite element methods, Metals, Chemical elements, Computer simulations, Maxwell's equations, Numerical analysis, Silver, Lithium, Near field, Surface plasmons

Read Abstract +

Proceedings Article | 20 May 2009 Paper

Finite-element simulations of light propagation through circular subwavelength apertures

Sven Burger, Bernd Kleemann, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 7366, 736621 (2009) https://doi.org/10.1117/12.822828

KEYWORDS: Finite element methods, Computer simulations, Silver, Maxwell's equations, Nanostructures, Finite-difference time-domain method, Near field, Numerical analysis, Light scattering, 3D modeling

Read Abstract +

Proceedings Article | 17 October 2008 Paper

Benchmark of rigorous methods for electromagnetic field simulations

Sven Burger, Lin Zschiedrich, Frank Schmidt, Peter Evanschitzky, Andreas Erdmann

Proceedings Volume 7122, 71221S (2008) https://doi.org/10.1117/12.801248

KEYWORDS: Finite element methods, Photomasks, Near field, Waveguides, Computer simulations, Lithography, Electromagnetism, Diffraction, Cadmium, Interfaces

Read Abstract +

Proceedings Article | 19 May 2008 Paper

Metrology of EUV masks by EUV-scatterometry and finite element analysis

Jan Pomplun, Sven Burger, Frank Schmidt, Frank Scholze, Christian Laubis, Uwe Dersch

Proceedings Volume 7028, 70280P (2008) https://doi.org/10.1117/12.793032

KEYWORDS: Extreme ultraviolet, Diffraction, Finite element methods, Photomasks, Scanning electron microscopy, Critical dimension metrology, Chemical elements, Cadmium, Scatterometry, Maxwell's equations

Read Abstract +

Proceedings Article | 21 March 2008 Paper

Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation

Frank Scholze, Christian Laubis, Gerhard Ulm, Uwe Dersch, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 6921, 69213R (2008) https://doi.org/10.1117/12.771923

KEYWORDS: Extreme ultraviolet, Scatterometry, Critical dimension metrology, Photomasks, Diffraction, Finite element methods, Multilayers, Extreme ultraviolet lithography, Reflectivity, Reflectometry

Read Abstract +

Proceedings Article | 7 March 2008 Paper

A rigorous finite-element domain decomposition method for electromagnetic near field simulations

Lin Zschiedrich, Sven Burger, Achim Schädle, Frank Schmidt

Proceedings Volume 6924, 692450 (2008) https://doi.org/10.1117/12.771989

KEYWORDS: Maxwell's equations, Electromagnetism, Finite element methods, Photomasks, Chemical elements, Near field, Wave propagation, Computer simulations, Interfaces, Optical lithography

Read Abstract +

Proceedings Article | 12 February 2008 Paper

Advanced FEM analysis of optical waveguides: algorithms and applications

Frank Schmidt, Sven Burger, Jan Pomplun, Lin Zschiedrich

Proceedings Volume 6896, 689602 (2008) https://doi.org/10.1117/12.765720

KEYWORDS: Finite element methods, Chemical elements, Waveguides, Maxwell's equations, Cladding, Refractive index, Wave propagation, Zoom lenses, Photonic crystal fibers, Surface plasmons

Read Abstract +

Proceedings Article | 30 October 2007 Paper

EMF simulations of isolated and periodic 3D photomask patterns

Sven Burger, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Bernd Küchler, Christoph Nölscher

Proceedings Volume 6730, 67301W (2007) https://doi.org/10.1117/12.746392

KEYWORDS: Finite element methods, Photomasks, Computer simulations, Critical dimension metrology, Near field, Chemical elements, Light scattering, Chromium, Optical lithography, Electromagnetism

Read Abstract +

Proceedings Article | 18 June 2007 Paper

Influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks

Frank Scholze, Christian Laubis, Uwe Dersch, Jan Pomplun, Sven Burger, Frank Schmidt

Proceedings Volume 6617, 66171A (2007) https://doi.org/10.1117/12.726159

KEYWORDS: Extreme ultraviolet, Diffraction, Scatterometry, Critical dimension metrology, Photomasks, Scattering, Light scattering, Finite element methods, Reflectometry, Reflectivity

Read Abstract +

Proceedings Article | 18 June 2007 Paper

Finite element analysis of EUV lithography

Jan Pomplun, Sven Burger, Frank Schmidt, Frank Scholze, Christian Laubis, Uwe Dersch

Proceedings Volume 6617, 661718 (2007) https://doi.org/10.1117/12.726156

KEYWORDS: Diffraction, Extreme ultraviolet, Finite element methods, Photomasks, Scatterometry, Scatter measurement, Computer simulations, Extreme ultraviolet lithography, Scanning electron microscopy, Scattering

Read Abstract +

Proceedings Article | 18 June 2007 Paper

3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method

Sven Burger, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Thomas Henkel, Bernd Küchler, Christoph Nölscher

Proceedings Volume 6617, 66170V (2007) https://doi.org/10.1117/12.726236

KEYWORDS: Etching, Diffraction, Finite element methods, Photomasks, Computer simulations, Chemical elements, Electromagnetism, Optical lithography, Nanostructures, Radio propagation

Read Abstract +

Proceedings Article | 9 February 2007 Paper

Goal oriented adaptive finite element method for precise simulation of optical components

Lin Zschiedrich, Sven Burger, Jan Pomplun, Frank Schmidt

Proceedings Volume 6475, 64750H (2007) https://doi.org/10.1117/12.698167

KEYWORDS: Waveguides, Error analysis, Wave propagation, Chemical elements, Finite element methods, Optical components, Radio propagation, Optical simulations, Waveguide modes, Electromagnetism

Read Abstract +

Proceedings Article | 5 February 2007 Paper

FEM investigation of leaky modes in hollow core photonic crystal fibers

Jan Pomplun, Ronald Holzlöhner, Sven Burger, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 6480, 64800M (2007) https://doi.org/10.1117/12.700495

KEYWORDS: Finite element methods, Photonic crystal fibers, Cladding, Optical fibers, Refractive index, Adaptive optics, Photonic crystals, Chemical elements, Interfaces, Numerical analysis

Read Abstract +

Proceedings Article | 20 October 2006 Paper

Rigorous FEM simulation of EUV masks: influence of shape and material parameters

Jan Pomplun, Sven Burger, Frank Schmidt, Lin Zschiedrich, Frank Scholze, Christian Laubis, Uwe Dersch

Proceedings Volume 6349, 63493D (2006) https://doi.org/10.1117/12.686828

KEYWORDS: Extreme ultraviolet, Finite element methods, Diffraction, Scatterometry, Photomasks, Scatter measurement, Computer simulations, Numerical simulations, Critical dimension metrology, Scattering

Read Abstract +

Proceedings Article | 20 October 2006 Paper

Rigorous simulation of 3D masks

Sven Burger, Roderick Köhle, Lin Zschiedrich, Hoa Nguyen, Frank Schmidt, Reinhard März, Christoph Nölscher

Proceedings Volume 6349, 63494Z (2006) https://doi.org/10.1117/12.687816

KEYWORDS: Finite element methods, Chemical elements, Photomasks, Computer simulations, Lithography, Image processing, Diffraction, Polarization, Airborne remote sensing, Photoresist processing

Read Abstract +

Proceedings Article | 20 April 2006 Paper

Advanced FEM analysis of nano-optical devices

Sven Burger, Achim Schädle, Lin Zschiedrich, Frank Schmidt

Proceedings Volume 6195, 61950C (2006) https://doi.org/10.1117/12.662942

KEYWORDS: Finite element methods, Magnetism, Chemical elements, Computer simulations, Near infrared, Metamaterials, Optical lithography, Light scattering, Numerical analysis, Photomasks

Read Abstract +

Proceedings Article | 28 February 2006 Paper

Advanced finite element method for nano-resonators

Lin Zschiedrich, Sven Burger, Benjamin Kettner, Frank Schmidt

Proceedings Volume 6115, 611515 (2006) https://doi.org/10.1117/12.646252

KEYWORDS: Prisms, Finite element methods, Scattering, Numerical analysis, Light scattering, Metamaterials, Magnetism, Radio propagation, Computing systems, Split ring resonators

Read Abstract +

Proceedings Article | 5 November 2005 Paper

Benchmark of FEM, waveguide, and FDTD algorithms for rigorous mask simulation

Sven Burger, Roderick Köhle, Lin Zschiedrich, Weimin Gao, Frank Schmidt, Reinhard März, Christoph Nölscher

Proceedings Volume 5992, 599216 (2005) https://doi.org/10.1117/12.631696

KEYWORDS: Finite element methods, Photomasks, Computer simulations, Diffraction, Finite-difference time-domain method, Polarization, Chemical elements, Solids, Waveguides, Lithography

Read Abstract +

Proceedings Article | 27 September 2005 Paper

Numerical investigation of light scattering off split-ring resonators

Sven Burger, Lin Zschiedrich, Roland Klose, Achim Schädle, Frank Schmidt, Christian Enkrich, Stefan Linden, Martin Wegener, Costas Soukoulis

Proceedings Volume 5955, 595503 (2005) https://doi.org/10.1117/12.622184

KEYWORDS: Magnetism, Split ring resonators, Geometrical optics, Near infrared, Light scattering, Chemical elements, Metamaterials, Finite element methods, Polarization, Gold

Read Abstract +

Proceedings Article | 31 March 2005 Paper

FEM modeling of 3D photonic crystals and photonic crystal waveguides

Sven Burger, Roland Klose, Achim Schaedle, Frank Schmidt, Lin Zschiedrich

Proceedings Volume 5728, (2005) https://doi.org/10.1117/12.585895

KEYWORDS: Photonic crystals, Waveguides, Chemical elements, 3D modeling, Finite element methods, Magnetism, Light scattering, Refractive index, Scattering, Error analysis

Read Abstract +

Proceedings Article | 31 March 2005 Paper

JCMmode: an adaptive finite element solver for the computation of leaky modes

Lin Zschiedrich, Sven Burger, Roland Klose, Achim Schaedle, Frank Schmidt

Proceedings Volume 5728, (2005) https://doi.org/10.1117/12.590372

KEYWORDS: Waveguides, Chemical elements, Lab on a chip, Wave propagation, Metals, Refractive index, Magnetism, Error analysis, Optical design, Silicon

Read Abstract +

Proceedings Article | 25 October 2004 Paper

High-contrast planar photonic crystals

Reinhard Marz, Sven Burger, Alfred Forchel, Helmut Heidrich, Ortwin Hess, Dirk Michaelis, Klaus Wandel, Ralph Wehrspohn

Proceedings Volume 5597, (2004) https://doi.org/10.1117/12.580070

KEYWORDS: Photonic crystals, Nanophotonics, Waveguides, Optical networks, Instrument modeling, Systems modeling, Etching, Optimization (mathematics), Dispersion, Fiber lasers

Read Abstract +