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Tetsuo Hayakawa
at Canare Electric Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 25 April 2008 Paper
Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices
T. Kusserow, S. Ferwana, T. Nakamura, T. Hayakawa, N. Dharmarasu, B. Vengatesan, H. Hillmer
Proceedings Volume 6993, 69930B (2008) https://doi.org/10.1117/12.781359
KEYWORDS: Etching, Indium gallium arsenide, Optical filters, Wet etching, Tunable filters, Reflectivity, Electronic filtering, Doping, Optical components, Arsenic
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