Dr. Toshiro Itani
at Osaka Univ
SPIE Involvement:
Conference Chair | Editor | Author
Publications (142)

Proceedings Article | 14 October 2020 Poster + Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Lithography, Optical lithography, Bridges, Line width roughness, Extreme ultraviolet lithography, Photoresist processing, Stochastic processes, Standards development

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Packaging, Semiconductors, Optical lithography, Laser applications, Laser ablation, Excimer lasers, Laser systems engineering

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Semiconductors, Lithography, Optical lithography, Extreme ultraviolet lithography, Photoresist processing

Proceedings Article | 28 June 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Oxides, Nanoparticles, Metals, X-rays, Reflectivity, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Zirconium dioxide

Proceedings Article | 12 October 2018 Presentation
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Nanoparticles, Polymers, Metals, Diffusion, Extreme ultraviolet lithography, Line edge roughness, Zirconium dioxide, Stochastic processes, Chemically amplified resists

Showing 5 of 142 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 20 October 2020

SPIE Conference Volume | 15 November 2019

SPIE Conference Volume | 23 November 2018

SPIE Conference Volume | 29 November 2017

Conference Committee Involvement (6)
International Conference on Extreme Ultraviolet Lithography 2021
26 September 2021 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2020
21 September 2020 | Online Only, California, United States
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2018
17 September 2018 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography
11 September 2017 | Monterey, California, United States
Showing 5 of 6 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top