Mr. Tadashi Mitsui Profile

Tadashi Mitsui

at Toshiba Corp

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Publications (2)

Proceedings Article | 24 March 2009 Paper

Hotspot monitoring system with contour-based metrology

A. Kawamoto, Y. Tanaka, S. Tsuda, K. Shibayama, S. Furukawa, H. Abe, T. Mitsui, Y. Yamazaki

Proceedings Volume 7272, 72721F (2009) https://doi.org/10.1117/12.814022

KEYWORDS: Inspection, Metrology, Lithography, Critical dimension metrology, Manufacturing, Visualization, Image acquisition, Semiconducting wafers, Process control, Image processing

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Proceedings Article | 17 December 2003 Paper

Fine pixel CD-SEM for measurements of two-dimensional patterns

Shinji Yamaguchi, Masamitsu Itoh, Takahiro Ikeda, Yumiko Miyano, Tadashi Mitsui, Masuo Amma, Shoichi Horikawa

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518289

KEYWORDS: Scanning electron microscopy, Optical proximity correction, Image quality, Image acquisition, Head, Algorithm development, Semiconductors, Quality measurement, Photomasks, Electron beams

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