Proceedings Article | 31 March 2006
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Sensors, Silicon, Thin films, Silicon films, Organic semiconductors, Oxides, Electronics, Dielectrics, Electrodes, Polymers
Organic semiconductors, such as pentacene, are particularly interesting because of its potential for various applications
including thin film transistors (TFTs), electronic papers, radio frequency identification cards (RFIDs), and sensors. In
this paper, we review recent progress in organic electronics with emphasis on their applications for sensing devices, and
investigate the morphologies of pentacene films deposited on SiO2 and Si surfaces at different substrate temperatures.
Scanning electron microcopy (SEM) micrographs from a nominally 50nm-thick pentacene film on SiO2 indicate that the
grain sizes of pentacene film increase with an increase in substrate temperature. In addition, the grain size on clean
silicon grown at a substrate temperature of 100 degrees C is markedly larger that on SiO2, ranging 10~20μm. Based on this
morphological investigation on pentacene films, various types of organic sensors and devices with conjunction with
interdigitated, gated and ungated structures are presented.
