Mr. Taiki Kimura Profile

Taiki Kimura

at KIOXIA Corp

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Author

Publications (9)

Proceedings Article | 23 March 2020 Presentation + Paper

Compact resist model using single convolution kernel

Taiki Kimura, Tetsuaki Matsunawa, Shoji Mimotogi

Proceedings Volume 11327, 113270H (2020) https://doi.org/10.1117/12.2551859

KEYWORDS: Convolution, Photomasks, Lithography, Inverse problems, Statistical modeling

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Proceedings Article | 20 March 2019 Paper

Multi-criteria hotspot detection using pattern classification

Kazufumi Shiozawa, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, Toshiya Kotani

Proceedings Volume 10962, 109620T (2019) https://doi.org/10.1117/12.2515665

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Image classification, Photomasks, System on a chip, Convolution, Wafer inspection

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Proceedings Article | 20 March 2019 Paper

Lithography hotspot candidate detection using coherence map

Tetsuaki Matsunawa, Taiki Kimura, Shigeki Nojima

Proceedings Volume 10962, 109620Q (2019) https://doi.org/10.1117/12.2515664

KEYWORDS: Lithography, Machine learning, Semiconducting wafers, System on a chip, Photomasks, Optical proximity correction, Etching, Manufacturing, Performance modeling, Convolution

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Proceedings Article | 13 July 2017 Paper

Accurate lithography simulation model based on convolutional neural networks

Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima

Proceedings Volume 10454, 104540I (2017) https://doi.org/10.1117/12.2279780

KEYWORDS: Convolutional neural networks, Semiconductor manufacturing, Lithography, Neural networks

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Proceedings Article | 30 March 2017 Paper

Accurate lithography simulation model based on convolutional neural networks

Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima

Proceedings Volume 10147, 101470K (2017) https://doi.org/10.1117/12.2257871

KEYWORDS: Convolutional neural networks, Neural networks, Lithography, Optical proximity correction, Feature extraction, Convolution, Design for manufacturing, Semiconducting wafers, Photomasks, Computer architecture, Performance modeling, Critical dimension metrology, Image processing, Data modeling

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Proceedings Article | 30 March 2017 Presentation + Paper

SOCS based post-layout optimization for multiple patterns with light interference prediction

Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, David Pan

Proceedings Volume 10148, 101480A (2017) https://doi.org/10.1117/12.2260091

KEYWORDS: SRAF, Lithography, Optical lithography, Semiconducting wafers, Wafer-level optics, Photovoltaics, Optical proximity correction, Image processing, Constructive interference, Destructive interference

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Proceedings Article | 22 March 2016 Paper

Hybrid hotspot detection using regression model and lithography simulation

Taiki Kimura, Tetsuaki Matsunawa, Shigeki Nojima, David Pan

Proceedings Volume 9781, 97810C (2016) https://doi.org/10.1117/12.2219318

KEYWORDS: Lithography, Computer simulations, 193nm lithography, Feature extraction, Simulation of CCA and DLA aggregates, Semiconducting wafers, Manufacturing, Etching, Scanning electron microscopy, Photomasks

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Proceedings Article | 26 March 2015 Paper

Hot spots prediction after etching process based on defect rate

Taiki Kimura, Yuki Watanabe, Toshiya Kotani

Proceedings Volume 9426, 942610 (2015) https://doi.org/10.1117/12.2085726

KEYWORDS: Etching, Lithography, Scanning electron microscopy, Photoresist processing, Lithographic illumination, Image processing, Wafer-level optics, Semiconducting wafers, Immersion lithography, Optical simulations

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Proceedings Article | 12 April 2013 Paper

Source and mask optimization to mitigate hotspots in etch process

Yuko Kono, Yasunobu Kai, Kazuyuki Masukawa, Sayaka Tamaoki, Takaki Hashimoto, Taiki Kimura, Ryota Aburada, Toshiya Kotani

Proceedings Volume 8683, 86830N (2013) https://doi.org/10.1117/12.2011648

KEYWORDS: Source mask optimization, Lithography, Etching, Photomasks, 3D image processing, Photoresist processing, Semiconducting wafers, Reactive ion etching, 3D modeling, Nanoimprint lithography

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Showing 5 of 9 publications

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