Mr. Takahiro Hiromatsu Profile

Takahiro Hiromatsu

at HOYA Corp

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Author

Publications (3)

Proceedings Article | 29 August 2019 Paper

Continuous challenges for next era of lithography

Takahiro Hiromatsu, Ryo Ohkubo, Hitoshi Maeda, Toru Fukui, Hiroaki Shishido, Kazunori Ono, Masahiro Hashimoto

Proceedings Volume 11177, 1117705 (2019) https://doi.org/10.1117/12.2534910

KEYWORDS: Extreme ultraviolet, Nanoimprint lithography, Binary data, Semiconducting wafers

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Proceedings Article | 27 March 2014 Paper

Reduction of image placement error on photomask-making for multiple patterning

Takahiro Hiromatsu, Toru Fukui, Kenta Tsukagoshi, Kazunori Ono, Masahiro Hashimoto

Proceedings Volume 9051, 90510U (2014) https://doi.org/10.1117/12.2046777

KEYWORDS: Diffusion, Electron beam lithography, Coating, Electron beams, Photomasks, Photoresist processing, Chemically amplified resists, Radon, Lithography, Ions

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Proceedings Article | 27 March 2014 Paper

SRAF window improvement with under-coating layer

Takahiro Hiromatsu, Toru Fukui, Kenta Tsukagoshi, Kazunori Ono, Masahiro Hashimoto

Proceedings Volume 9051, 905120 (2014) https://doi.org/10.1117/12.2046779

KEYWORDS: SRAF, Chromium, Photomasks, Etching, Photoresist processing, Optical lithography, Coating, Absorption, Liquids, Line edge roughness

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