Dr. Takahiro Ikeda
CEO at Pi Photonics
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 November 2005
JBO Vol. 10 Issue 06
KEYWORDS: Microscopy, High power microwaves, Blood, Microscopes, Photonics, Phase measurement, Refractive index, Collimation, Charge-coupled devices, Spectroscopy

Proceedings Article | 1 September 2005 Paper
Proc. SPIE. 5864, Novel Optical Instrumentation for Biomedical Applications II
KEYWORDS: Microscopes, Beam splitters, Blood, Microscopy, Imaging spectroscopy, Atomic force microscopy, Objectives, Charge-coupled devices, High power microwaves, Phase shifts

Proceedings Article | 20 August 2004 Paper
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Defect detection, Manufacturing, Inspection, Image resolution, Scanning electron microscopy, Photomasks, Data conversion, Semiconducting wafers, Standards development

Proceedings Article | 20 August 2004 Paper
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Optical lithography, Metals, Image processing, Manufacturing, Feature extraction, Scanning electron microscopy, Optical proximity correction, Computer aided design, Tolerancing

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Semiconductors, Pattern recognition, Error analysis, Quality measurement, Scanning electron microscopy, Image quality, Critical dimension metrology, Neodymium, Semiconducting wafers, Factor analysis

Showing 5 of 9 publications
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