Dr. Takahiro Yasue Profile

Dr. Takahiro Yasue

at SAMSUNG Electronics Co Ltd

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Publications (2)

Proceedings Article | 20 March 2010 Paper

Patterning with EUVL: the road to 22nm node

Hyun-Woo Kim, Hai-Sub Na, Kyoung-Yong Cho, Chang-Min Park, Takahiro Yasue, Subramanya Mayya, Han-Ku Cho

Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography

KEYWORDS: Lithography, Deep ultraviolet, Opacity, Polymers, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Double patterning technology, Chemical reactions

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Proceedings Article | 11 December 2009 Paper

EUV sensitive photo-acid generator sans chromophore

K. Subramanya Mayya, Yool Kang, Takahiro Yasue, Seok-Hwan Oh, Seong-Woon Choi, Chan-Hoon Park

Proc. SPIE. 7520, Lithography Asia 2009

KEYWORDS: Lithography, Optical transfer functions, Switches, Optical lithography, Polymers, Electrons, Scanning electron microscopy, Chromophores, Extreme ultraviolet, Extreme ultraviolet lithography

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