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Takahisa Maruyama
Technical Staff at Tohoku Univ
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Publications (1)
Proceedings Article | 10 May 2005 Paper
A super-precision evaluation method of ultra-low expansion glasses using the line-focus-beam ultrasonic material characterization system
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599160
KEYWORDS: Glasses, Ultrasonics, Velocity measurements, Chemical analysis, Material characterization, Extreme ultraviolet lithography, Nondestructive evaluation, Acoustics, Wave propagation, Silica
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