Dr. Takanori Katoh Profile

Dr. Takanori Katoh

Researcher at Sumitomo Heavy Industries Ltd

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Publications (1)

Proceedings Article | 15 January 2003 Paper

High-aspect-ratio microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Takanori Katoh, Yasunori Sato, Daichi Yamaguchi, Shigetoshi Ikeda, Yasushi Aoki, Ahihiro Oshima, Masakazu Washio, Yoneho Tabata

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.472802

KEYWORDS: Etching, Crystals, Microfabrication, Synchrotron radiation, Fluorine, FT-IR spectroscopy, Solid state physics, Spectroscopy, Molecules, Signal detection

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