Dr. Takashi Ando Profile

Dr. Takashi Ando

at Hitachi Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 27 August 2005 Paper

Developments of nanoimprint technologies and applications

Takashi Ando, Kosuke Kuwabara, Chiseki Haginoya, Masahiko Ogino, Kenya Ohashi, Akihiro Miyauchi

Proceedings Volume 5931, 59310B (2005) https://doi.org/10.1117/12.616384

KEYWORDS: Nanoimprint lithography, Polymers, Nanotechnology, Luminescence, Semiconducting wafers, Nanolithography, Optical lithography, Scanning electron microscopy, Information technology, Technologies and applications

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Conference Committee Involvement (2)

Nanoengineering: Fabrication, Properties, Optics, and Devices III

15 August 2006 | San Diego, California, United States

Nanoengineering: Fabrication, Properties, Optics, and Devices II

3 August 2005 | San Diego, California, United States

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