Dr. Takashi Onose Profile

Dr. Takashi Onose

Chief Engineering Manager at Gigaphoton Inc

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 2 March 2020 Paper

High peak power DUV laser processing

Hironori Igarashi, Takashi Onose, Taisuke Miura, Ryoichi Nohdomi, Yoshihiko Murakami, Junichi Fujimoto, Hakaru Mizoguchi, Yasuhiro Kamba, Atsushi Fuchimukai, Chen Qu, Yuki Tamaru, Yohei Tanaka, Hiroaki Oizumi, Yuujirou Sasaki

Proceedings Volume 11273, 112730L (2020) https://doi.org/10.1117/12.2549826

KEYWORDS: Excimer lasers, Deep ultraviolet, Laser processing, Pulsed laser operation, Picosecond phenomena, Laser drilling, Semiconductors, Lithography, Fiber lasers, Light sources

Read Abstract +

Proceedings Article | 25 March 2019 Presentation + Paper

Microprocessing of organic material for semiconductor packaging by 248 nm excimer laser

Akira Suwa, Junichi Fujimoto, Yasufumi Kawasuji, Masakazu Kobayashi, Masashi Shimbori, Takashi Onose, Masaki Arakawa, Akira Mizutani, Hakaru Mizoguchi

Proceedings Volume 10906, 1090609 (2019) https://doi.org/10.1117/12.2510951

KEYWORDS: Excimer lasers, Organic materials, Scanning electron microscopy, Semiconductors, Packaging, Deep ultraviolet, Organic semiconductors, Semiconductor materials, Materials processing, Laser processing

Read Abstract +

Proceedings Article | 16 March 2016 Paper

Development of high coherence high power 193nm laser

Satoshi Tanaka, Masaki Arakawa, Atsushi Fuchimukai, Yoichi Sasaki, Takashi Onose, Yasuhiro Kamba, Hironori Igarashi, Chen Qu, Mitsuru Tamiya, Shinji Ito, Koji Kakizaki, Hongwen Xuan, Yohei Kobayashi, Hakaru Mizoguchi, Zhigang Zhao, Hiroaki Oizumi

Proceedings Volume 9726, 972624 (2016) https://doi.org/10.1117/12.2211210

KEYWORDS: Solid state lasers, Excimer lasers, Laser systems engineering, Deep ultraviolet, Optical amplifiers, Amplifiers, Crystals, High power lasers, Semiconducting wafers, Fiber amplifiers

Read Abstract +

Proceedings Article | 20 February 2015 Paper

Development of high coherence, 200mW, 193nm solid-state laser at 6 kHz

T. Nakazato, M. Tsuboi, T. Onose, Y. Tanaka, N. Sarukura, S. Ito, K. Kakizaki, S. Watanabe

Proceedings Volume 9342, 93420P (2015) https://doi.org/10.1117/12.2078601

KEYWORDS: Amplifiers, Crystals, Oscillators, Mirrors, Solid state lasers, Sapphire lasers, Laser systems engineering, Thermal effects, Nonlinear crystals, Laser development

Read Abstract +

Proceedings Article | 10 March 2010 Paper

Flexible and reliable high power injection locked laser for double exposure and double patterning ArF immersion lithography

Hiroaki Tsushima, Masaya Yoshino, Hiroyuki Nogawa, Junichi Fujimoto, Takashi Matsunaga, Hakaru Mizoguchi, Hidenori Watanabe, Satoshi Tanaka, Shinich Matsumoto, Hiroshi Umeda, Yasufumi Kawasuji, Takashi Onose

Proceedings Volume 7640, 76402A (2010) https://doi.org/10.1117/12.846337

KEYWORDS: Reliability, Double patterning technology, Excimer lasers, High power lasers, Immersion lithography, Lithography, Pulsed laser operation, Laser stabilization, Laser applications, Laser development

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years