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Takayuki Yamada
at Fuji Xerox Co Ltd
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Publications (1)
Proceedings Article | 13 November 2002 Paper
Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micromechanical parts
Takayuki Yamada, Mutsuya Takahashi, Takashi Ozawa, Satoshi Tawara, Takayuki Goto
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469668
KEYWORDS: Interfaces, Aluminum, Transmission electron microscopy, Thin films, 3D microstructuring, Surface roughness, Bridges, Silicon, Scanning electron microscopy, Argon
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