The semiconductor industry requires ever smaller semiconductor structures with faster response times and more function per unit area of each chip. In addition, the industry is changing from 200 mm to 300 mm diameter wafers with fewer defects and rapid detection at all processing stages. To meet these needs, defect data must be processed in near-real-time to expedite correction of processing problems at the earliest possible stage. Under a Small Business Innovation Research (SBIR) program, sponsored by the Air Force Manufacturing Technology Division at Wright Laboratory, Dayton, Ohio, Sentec Corporation has developed a revolutionary technology for contaminant particle detection on unpatterned semiconductor wafers. A key to the Sentec technology is detection, not of the intensity of backscattered energy from particles or defects, but of the amplitude of the electro-magneitc field of this backscattered energy. This new technology will allow the detection of particles that are significantly smaller than those which can be reliably located using current scatterometers. The technical concepts for a stand-alone particle detection tool have been created. It uses a continuous scanning mechanism to perform high-speed examinations of target wafers. This tool, also, has the capability of quantifying the microroughness or background haze of a subject wafer and presenting that information separate from the contamination particle data. During the course of this project, three patent applications were filed.
We developed a fiber optic pressure catheter which has the potential to exceed the performance and cost-effectiveness of any currently available pressure measurement system in cardiovascular applications. Our design is based on a movable metallic ribbon, which works as a reflector, to transform the pressure into a light signal. The sensor has a diameter of 0.8 mm and is covered by medical grade polyurethane. In the laboratory tests, our sensors consistently showed high sensitivity and low noise (about 1 mmHg) over the pressure range of 0 to 300 mmHg. The time constant of the sensor, which is limited by the current software is about 20 mseconds (50 Hz). Using a mechanical heart simulator to generate pressure pulses, the pressure reading was independent of temperature change over a 30 degree Celsius range, and the drift was minimal during the 72-hour pressure pulse tests. A preliminary animal test was carried out with our sensors inserted into the artery of a dog. The comparison with an external reference sensor showed basic sensor performance. The sensor can also be used in brain, lung, and bladder pressure measurement applications.
A simple optical fiber temperature sensor is under development. The expected temperature range to be measured by the sensor is from minus 50 degrees Celsius to over 1000 degrees Celsius, and the measurement accuracy is 1 degree Celsius. The sensor is robust against harsh environments. It is immune to source fluctuations, surface deterioration of the optical element inside the sensor head, and coupling inconsistency [sensor to electro-optics (EO) board]. The sensor is constructed so that calibration is done automatically upon installation. The sensor uses a high-temperature fiber and a high-temperature metal, and its operation is based on a simple optical interferometer. The source for the sensor is a wideband (white light) source. Data processing software is needed to operate the sensor. The frequency response is 10 Hz or faster. A breadboard sensor made of stainless steel and a silica fiber was built and tested to temperatures up to 500 degrees Celsius. The results show the feasibility of the proposed concept.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.