Prof. Takeo Watanabe
Director, Professor at Univ of Hyogo
SPIE Involvement:
Author
Publications (62)

Proceedings Article | 26 October 2020 Presentation + Paper
Proc. SPIE. 11518, Photomask Technology 2020
KEYWORDS: Microscopes, Coherence imaging, Inspection, Electron microscopes, Scanning electron microscopy, Scatterometry, Double patterning technology, High volume manufacturing, Nanoimprint lithography, Defect inspection

Proceedings Article | 26 September 2019 Presentation + Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Mirrors, Ultraviolet radiation, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotrons, Monochromators, Vacuum ultraviolet, Plasma, Light

Proceedings Article | 3 October 2018 Presentation + Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Contamination, Nanoparticles, Metals, Particles, Mass spectrometry, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Polymethylmethacrylate, Deep ultraviolet, Silicon, Coating, Photodiodes, Reflectometry, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Absorption

Proceedings Article | 3 October 2018 Presentation + Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Multilayers, Polarization, Reflectivity, Polarizers, Reflectometry, Extreme ultraviolet, Extreme ultraviolet lithography, Polarization control

Showing 5 of 62 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top