Mr. Takeru Kinoshita Profile

Takeru Kinoshita

at HOYA Corp

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Author

Publications (3)

Proceedings Article | 17 December 2003 Paper

Fabrication of programmed phase defects on EUV multilayer blanks

Takeru Kinoshita, Tsutomu Shoki, Hideo Kobayashi, Ryo Ohkubo, You-Ichi Usui, Morio Hosoya, Noriyuki Sakaya, Osamu Nagarekawa

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517836

KEYWORDS: Multilayers, Extreme ultraviolet, Transmission electron microscopy, Defect inspection, Atomic force microscopy, Inspection, Glasses, Photomasks, Silicon, Coating

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Proceedings Article | 28 August 2003 Paper

Exposure contrast of an EUV mask

Morio Hosoya, Tsutomu Shoki, Takeru Kinoshita, Noriyuki Sakaya, Osamu Nagarekawa

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504072

KEYWORDS: Reflectivity, Multilayers, Extreme ultraviolet, Extreme ultraviolet lithography, Photomasks, Silicon, Optical simulations, Chromium, Molybdenum, Ruthenium

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Proceedings Article | 1 August 2002 Paper

Process development of 6-in EUV mask with TaBN absorber

Tsutomu Shoki, Morio Hosoya, Takeru Kinoshita, Hideo Kobayashi, Youichi Usui, Ryo Ohkubo, Shinichi Ishibashi, Osamu Nagarekawa

Proceedings Volume 4754, (2002) https://doi.org/10.1117/12.477007

KEYWORDS: Reflectivity, Extreme ultraviolet, Multilayers, Photomasks, Silicon, Chromium, Ion beams, Glasses, Etching, Inspection

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