Takeshi Konno
at NIMS
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 31 March 2006 Paper
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Gold, Electrodes, Metals, Capillaries, Particles, Tungsten, Dielectrics, Epoxies, Semiconducting wafers

Proceedings Article | 31 March 2006 Paper
Proc. SPIE. 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Semiconductors, Gold, Microscopes, Metals, Particles, Tungsten, Photography, Resistance, Power supplies, Semiconducting wafers

Proceedings Article | 16 August 2001 Paper
Proc. SPIE. 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS
KEYWORDS: Actuators, Gold, Ferroelectric materials, Electrodes, Metals, Particles, Composites, Resistance, Magnetism, Ion beams

Proceedings Article | 21 June 2000 Paper
Proc. SPIE. 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS
KEYWORDS: Actuators, Gold, Polymers, Metals, Particles, Tungsten, Nickel, Photography, Magnetism, Microfabrication

Proceedings Article | 19 June 1997 Paper
Proc. SPIE. 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS
KEYWORDS: Fabrication, Actuators, Gold, Microscopes, Etching, Glasses, Particles, Nickel, Magnetism, Microactuators

Showing 5 of 6 publications
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