Dr. Tamer T. Elazhary
Optical Scientist at Facebook Technologies LLC
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 14 October 2010 Paper
Proc. SPIE. 7826, Sensors, Systems, and Next-Generation Satellites XIV
KEYWORDS: Signal to noise ratio, Cameras, Sensors, Satellites, Remote sensing, Image resolution, Ocean optics, Satellite imaging, Satellite communications, Modulation transfer functions

Proceedings Article | 10 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Data modeling, Calibration, Data processing, Finite element methods, Optical proximity correction, Critical dimension metrology, Photoresist processing, Optical calibration, Process modeling, Instrument modeling

Proceedings Article | 23 September 2009 Paper
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Photovoltaics, Statistical analysis, Visualization, Etching, Photomasks, Optical proximity correction, SRAF, Photoresist processing, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Thin films, Diffraction, Optical lithography, Calibration, Optical simulations, Optical proximity correction, Critical dimension metrology, Process modeling, Beam analyzers, Resolution enhancement technologies

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Diffraction, Optical lithography, Scattering, Error analysis, Image analysis, Photomasks, Critical dimension metrology, Panoramic photography, Resolution enhancement technologies, Fiber optic illuminators

Showing 5 of 8 publications
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