Tanbir Hasan
Sr Design Engineer
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconducting wafers, Metrology, Optical lithography, Electron beam lithography, Scanners, Finite element methods, Scanning electron microscopy, Lithography, Inspection, Computational lithography

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Overlay metrology, Critical dimension metrology, Optical lithography, Scanners, Semiconductors, Semiconducting wafers, Etching, Sensors, Reticles

Proceedings Article | 24 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Scanners, Metrology, Image processing, Process control, Silicon, Sensors, Overlay metrology, Inspection, Forward error correction, Electroluminescence, Visualization, Diffraction, Field emission displays

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconducting wafers, Scanners, Servomechanisms, Sensors, Optimization (mathematics), Lithography, Yield improvement, Model-based design, Control systems, Process control

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Scanners, Design for manufacturability, Manufacturing, Product engineering, Reticles, Visualization, Image resolution, Chemical mechanical planarization, Sensors, Time metrology, Data modeling, Semiconducting wafers, Optical lithography, Performance modeling, Photomasks

Showing 5 of 7 publications
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