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Tao Huang
at Huazhong Univ of Science and Technology
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Publications (1)
Proceedings Article | 3 February 2009 Paper
Focusing and leveling system for optical lithography using linear CCD
Tao Huang, Shiyuan Liu, Pengxing Yi, Tielin Shi
Proceedings Volume 7160, 71602X (2009) https://doi.org/10.1117/12.808083
KEYWORDS: Charge-coupled devices, Semiconducting wafers, Calibration, Detection and tracking algorithms, Optical lithography, Image processing, Halogens, Edge detection, Light, Light sources
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