Dr. Tao Li Profile

Dr. Tao Li

at IBM

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Publications (3)

Proceedings Article | 22 February 2021 Presentation

Quasi-atomic layer etching of Si and nitride hard mask with Cl2 based chemistry

Tao Li, Stefan Schmitz, Phil Friddle, Samantha Tan, Wenbing Yang, Indira Seshadri

Proceedings Volume 11615, 116150E (2021) https://doi.org/10.1117/12.2583647

KEYWORDS: Etching, Silicon, Ions, Chemistry, Control systems, Plasma, Optical lithography, Modulation, Manufacturing, Chlorine

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Proceedings Article | 22 February 2021 Presentation

Performance of stacked nanosheet gate all around FET’s with EUV patterned gate and sheets

Indira Seshadri, Jennifer Church, Prateek Hundekar, Mary Breton, Jingyun Zhang, Eric Miller, Andrew Greene, Julien Frougier, Chris Waskiewicz, Tao Li, Tsung-Sheng Kang, Daniel Dechene, Carl Radens, Stuart Sieg, Veeraraghavan Basker, Nelson Felix, Chris Mack

Proceedings Volume 11609, 116090S (2021) https://doi.org/10.1117/12.2583897

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Proceedings Article | 25 March 2020 Presentation

A comparative analysis of EUV sheet and gate patterning for beyond 7nm gate all around stacked nanosheet FET’s (Conference Presentation)

Indira Seshadri, Praveen Joseph, Stuart Sieg, Tao Li, Wenyu Xu, Eric Miller, Dan Dechene, Andrew Greene, Carl Radens, Jingyun Zhang, Yann Mignot, Pietro Montanini, Mary Breton, Veeraraghavan Basker, Nelson Felix

Proceedings Volume 11328, 113280B (2020) https://doi.org/10.1117/12.2552159

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