Tao Wang
Microsystems Design Engineer at Mezzo Systems Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 January 2003 Paper
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Fabrication, Polymethylmethacrylate, Metals, X-rays, Ceramics, Nickel, Zinc, Scanning electron microscopy, Plasma, Lead

Proceedings Article | 15 January 2003 Paper
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Gold, Polymethylmethacrylate, Etching, Ultraviolet radiation, X-rays, Silicon, Photomasks, Plating, Semiconducting wafers, X-ray lithography

Proceedings Article | 1 September 1998 Paper
Proc. SPIE. 3512, Materials and Device Characterization in Micromachining
KEYWORDS: Microelectromechanical systems, Polymethylmethacrylate, Matrices, Particles, Composites, Nickel, Coating, Scanning electron microscopy, Aluminum, Plating

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top