Dr. Tao Xu Profile

Dr. Tao Xu

at Kulicke & Soffa Industries

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Publications (2)

Proceedings Article | 8 September 2010 Paper

Reliable metallic tape connection on CIGS solar cells by ultrasonic bonding

Tao Xu, Orlando Valentin, Christoph Luechinger

Proceedings Volume 7771, 77710R (2010) https://doi.org/10.1117/12.860962

KEYWORDS: Resistance, Molybdenum, Glasses, Ultrasonics, Solar cells, Copper indium gallium selenide, Aluminum, Selenium, Reliability, Thin films

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Proceedings Article | 21 November 2001 Paper

Processing compatibility of ZnO piezoelectric film with MEMS device

Tao Xu, Guoying Wu, Guobing Zhang, Yilong Hao

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448990

KEYWORDS: Zinc oxide, Etching, Microelectromechanical systems, Optical lithography, Reactive ion etching, Dry etching, Scanning electron microscopy, Photoresist materials, Photomicroscopy, Sputter deposition

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