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Taoufik El Mastouli
at Univ Paul Sabatier
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Publications (1)
Proceedings Article | 26 February 2008 Paper
Micro-inductors integrated on silicon for DC-DC converters
T. El Mastouli, J.P. Laur, J.L. Sanchez, M. Brunet, D. Bourrier, M. Dilhan
Proceedings Volume 6882, 68820A (2008) https://doi.org/10.1117/12.763085
KEYWORDS: Magnetism, Chemical mechanical planarization, Electroplating, Copper, Prototyping, Silicon, Inductance, Resistance, Photoresist materials, Micromachining
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