Dr. Tatsuya Yanagida
at Gigaphoton Inc
SPIE Involvement:
Author
Publications (30)

Proceedings Article | 23 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Mirrors, Semiconductors, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Magnetism, Light sources, Tin, Reflectivity

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Light sources, Tin, Magnetism, Extreme ultraviolet, Mirrors, Ions, Reflectivity, Sputter deposition, Semiconductors, Semiconductor manufacturing

Proceedings Article | 21 September 2020 Poster + Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Tin, Light sources, Mirrors, Magnetism, Extreme ultraviolet, Carbon dioxide lasers, Hydrogen, Chemical species, Pulsed laser operation, Reflectivity

Proceedings Article | 20 September 2020 Presentation
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Mirrors, Semiconductors, Extreme ultraviolet, Carbon dioxide lasers, Extreme ultraviolet lithography, Light sources, Magnetism, Magnetic semiconductors, Tin, Pulsed laser operation

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Gas lasers, Carbon monoxide, Extreme ultraviolet, Tin, Mirrors, Magnetism, Plasma, Light sources, Control systems, Pulsed laser operation

Showing 5 of 30 publications
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