Te-Hsun Lin
at National Tsing Hua Univ
SPIE Involvement:
Publications (5)

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Light sources, Optical lithography, Laser development, Photoresist materials, Vibrometry, Sapphire, Nanoimprint lithography, Semiconducting wafers, Laser systems engineering

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Optical lithography, Wavefronts, Scanning electron microscopy, Vibration control, Maskless lithography, Optical choppers, Nanolithography

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Laser sources, Lithography, Electron beam lithography, Diffraction, Mirrors, Optical lithography, Wavefronts, Diffraction gratings

Proceedings Article | 14 March 2016 Paper
Proc. SPIE. 9759, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IX
KEYWORDS: Microelectromechanical systems, Infrared sensors, Lithography, Mirrors, Light sources, Sensors, Polarizers, Optical testing, Sensing systems, Aluminum, System integration, Signal detection, Laser systems engineering

Proceedings Article | 4 March 2016 Paper
Proc. SPIE. 9736, Laser-based Micro- and Nanoprocessing X
KEYWORDS: Thin films, Lithography, Nanostructures, Optical lithography, Reflection, Reflectivity, Transmittance, Beam shaping, Maskless lithography, Nanolithography

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