Dr. Thaddeus Dziura
Principal Research Scientist
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Polymethylmethacrylate, Etching, Silicon, Inspection, Scanning electron microscopy, Scatterometry, Directed self assembly, Critical dimension metrology, Semiconducting wafers, Single crystal X-ray diffraction

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Polymethylmethacrylate, Data modeling, Scatterometry, Bridges, Directed self assembly, Picosecond phenomena, Critical dimension metrology, Line edge roughness, Semiconducting wafers

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Semiconductors, Metrology, Data modeling, Metals, Silicon, Transmission electron microscopy, Scatterometry, Critical dimension metrology, Semiconducting wafers, Back end of line

Proceedings Article | 24 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Oxides, Metrology, Data modeling, Metals, Dielectrics, Silicon, Scatterometry, Semiconducting wafers, Tin

Proceedings Article | 24 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Optical lithography, Etching, Spectroscopy, Reflectometry, Process control, Double patterning technology, Critical dimension metrology, Performance modeling, Systems modeling

Showing 5 of 17 publications
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