Thilo Schmidt
at Univ Siegen
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 15 February 2011 Paper
Proc. SPIE. 7926, Micromachining and Microfabrication Process Technology XVI
KEYWORDS: Microelectromechanical systems, Manufacturing, 3D modeling, Product engineering, Computer aided design, Excel, Instrument modeling, Data acquisition, Prototyping, Data modeling

Proceedings Article | 31 March 2010 Paper
Proc. SPIE. 7646, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2010
KEYWORDS: Product engineering, Molecular nanotechnology, Computer aided design, Microelectromechanical systems, Manufacturing, Software development, 3D modeling, Instrument modeling, Process engineering, Virtual colonoscopy

Proceedings Article | 21 August 2009 Paper
Proc. SPIE. 7402, Nanoengineering: Fabrication, Properties, Optics, and Devices VI
KEYWORDS: Product engineering, Molecular nanotechnology, Manufacturing, Microelectromechanical systems, Custom fabrication, Fabrication, Process engineering, Data processing, CMOS technology, Control systems

Proceedings Article | 30 December 2008 Paper
Proc. SPIE. 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
KEYWORDS: Microelectromechanical systems, Product engineering, Manufacturing, Computer aided design, Data modeling, Environmental management, Process engineering, Data processing, Custom fabrication, Interfaces

Proceedings Article | 7 March 2007 Paper
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Microelectromechanical systems, Virtual reality, Materials processing, Thin films, Device simulation, 3D modeling, Prototyping, Etching, Manufacturing, Data processing

Showing 5 of 12 publications
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