Dr. Thomas Foltyn Profile

Dr. Thomas Foltyn

at Fraunhofer IWS Dresden

SPIE Involvement:

Author

Publications (10)

Proceedings Article | 23 January 2006 Paper

Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 6114, 61140H (2006) https://doi.org/10.1117/12.644626

KEYWORDS: Aluminum, Reflectivity, Silver, Mirrors, Optical coatings, Micromirrors, Gold, Laser damage threshold, Dielectrics, Microopto electromechanical systems

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Proceedings Article | 5 October 2005 Paper

Preparation and characterization of multilayers for EUV applications

Th. Foltyn, S. Braun, W. Friedrich, A. Leson, M. Menzel

Proceedings Volume 5963, 59632C (2005) https://doi.org/10.1117/12.626116

KEYWORDS: Multilayers, Annealing, Reflectivity, Extreme ultraviolet, Molybdenum, Silicon, Mirrors, Temperature metrology, Heat treatments, Interfaces

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Proceedings Article | 5 October 2005 Paper

Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region

Thilo Sandner, Jan Uwe Schmidt, Harald Schenk, Hubert Lakner, Minghong Yang, Alexandre Gatto, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5963, 596314 (2005) https://doi.org/10.1117/12.625246

KEYWORDS: Reflectivity, Aluminum, Mirrors, Silver, Micromirrors, Thin film coatings, Optical coatings, Laser damage threshold, Radium, Dielectrics

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Proceedings Article | 22 January 2005 Paper

Micromechanical scanning mirrors with highly reflective NIR coatings for high-power applications

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Stefan Braun, Thomas Foltyn, Andreas Leson, Alexandre Gatto, Minghong Yang, Norbert Kaiser

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590448

KEYWORDS: Reflectivity, Aluminum, Near infrared, Mirrors, Optical coatings, Silver, Absorption, Dielectrics, Multilayers, Microopto electromechanical systems

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Proceedings Article | 22 January 2005 Paper

Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range

Thilo Sandner, Jan Schmidt, Harald Schenk, Hubert Lakner, Alexandre Gatto, Minghong Yang, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Proceedings Volume 5721, (2005) https://doi.org/10.1117/12.590522

KEYWORDS: Mirrors, Aluminum, Micromirrors, Deep ultraviolet, Reflectivity, Coating, Spatial light modulators, Vacuum ultraviolet, Multilayers, Silicon

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Proceedings Article | 18 October 2004 Paper

Smoothing of substrate roughness by carbon-based layers prepared by pulsed laser deposition (PLD)

Stefan Braun, Beatrice Bendjus, Thomas Foltyn, Maik Menzel, Jurgen Schreiber, Andreas Leson

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.560358

KEYWORDS: Carbon, Multilayers, Extreme ultraviolet, Surface roughness, Reflectivity, Particles, Laser energy, Pulsed laser operation, Pulsed laser deposition, Mirrors

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Proceedings Article | 18 October 2004 Paper

Design and development of an optical system for EUV-microscopy

Thomas Foltyn, Klaus Bergmann, Stefan Braun, Peter Gawlitza, Andreas Leson, Willy Neff, Konstantin Walter

Proceedings Volume 5533, (2004) https://doi.org/10.1117/12.559675

KEYWORDS: Mirrors, Reflectivity, Molybdenum, Objectives, Extreme ultraviolet, X-ray technology, Copper, X-ray lasers, X-ray lithography, X-rays

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Proceedings Article | 21 July 2004 Paper

Carbon buffer layers for smoothing substrates of EUV and x-ray multilayer mirrors

Stefan Braun, Beatrice Bendjus, Thomas Foltyn, Maik Menzel, Juergen Schreiber, Danny Weissbach

Proceedings Volume 5392, (2004) https://doi.org/10.1117/12.541365

KEYWORDS: Carbon, Extreme ultraviolet, Multilayers, Surface roughness, Particles, Reflectivity, Laser energy, Mirrors, Pulsed laser operation, Plasma

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Proceedings Article | 13 January 2004 Paper

Deposition of multilayer mirrors with arbitrary period thickness distributions

Thomas Foltyn, Stefan Braun, Matthew Moss, Andreas Leson

Proceedings Volume 5193, (2004) https://doi.org/10.1117/12.505401

KEYWORDS: Photomasks, Mirrors, Particles, X-rays, Extreme ultraviolet, Multilayers, Reflectometry, Reflectivity, Sputter deposition, Reflectors

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Proceedings Article | 16 June 2003 Paper

Multi component EUV multilayer mirrors

Stefan Braun, Thomas Foltyn, Ludwig van Loyen, Matthew Moss, Andreas Leson

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484984

KEYWORDS: Molybdenum, Multilayers, Reflectivity, Interfaces, Extreme ultraviolet, Ruthenium, Silicon, Silver, Crystals, Reflectometry

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Showing 5 of 10 publications

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