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Thomas Jakubski
at Advanced Mask Technology Ctr GmbH & Co KG
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Publications (2)
Proceedings Article | 27 May 2009 Paper
Increasing inspection equipment productivity by utilizing factory automation SW on TeraScan 5XX systems
Thomas Jakubski, Michal Piechoncinski, Raphael Moses, Bharathi Bugata, Heiko Schmalfuss, Ines Köhler, Jan Lisowski, Jens Klobes, Robert Fenske
Proceedings Volume 7470, 74700V (2009) https://doi.org/10.1117/12.835193
KEYWORDS: Inspection, Inspection equipment, Instrument modeling, Photomasks, Factory automation, Manufacturing, Reticles, System integration, Interfaces, Rule based systems
Proceedings Article | 17 October 2008 Paper
Process control of chrome dry etching by complete characterization of the RF power delivery
Björn Sass, Ralf Schubert, Thomas Jakubski, Sebastian Mauermann, Pavel Nesladek, Andreas Wiswesser, Karl-Heinz Gindra, Ray Malone
Proceedings Volume 7122, 71220E (2008) https://doi.org/10.1117/12.801080
KEYWORDS: Sensors, Photomasks, Etching, Plasma, Critical dimension metrology, Radio frequency circuits, Resistance, Dry etching, Process control, Plasma etching
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