Dr. Thomas Kämpfe
at Univ Lyon
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 2 April 2020 Presentation + Paper
Proc. SPIE. 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications
KEYWORDS: Lithography, Plasmonics, Nanostructures, Apodization, Moire patterns, Modulation, Numerical simulations, Photoresist materials, Diffraction gratings

Proceedings Article | 19 September 2018 Paper
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Lithography, Plasmonics, Plasmons, Polarization, Metals, Numerical simulations, Photoresist materials, Photoresist developing, Nanolithography, Diffraction gratings

Proceedings Article | 9 May 2018 Presentation + Paper
Proc. SPIE. 10680, Optical Sensing and Detection V
KEYWORDS: Lithium, 3D modeling, Projection systems

Proceedings Article | 29 April 2016 Paper
Proc. SPIE. 9898, Photonics for Solar Energy Systems VI
KEYWORDS: Reflectors, Refractive index, Multilayers, Optical lithography, Solar energy, Sputter deposition, Silicon, Nitrogen, Reflectivity, Receivers, Photoresist materials, Absorbance, Semiconducting wafers, Temperature metrology, Diffraction gratings, Absorption

Showing 5 of 18 publications
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