Mr. Thomas Klose Profile

Thomas Klose

at Fraunhofer-Institut für Photonische Mikrosysteme

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Author

Publications (7)

Proceedings Article | 19 February 2009 Paper

Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann, Holger Conrad, Thilo Sandner, Thomas Klose, Harald Schenk

Proceedings Volume 7208, 720808 (2009) https://doi.org/10.1117/12.808151

KEYWORDS: Mirrors, Sensors, Micromirrors, Resistance, Transformers, Piezoresistive sensors, Position sensors, Silicon, Bridges, Wheatstone bridges

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Proceedings Article | 8 February 2008 Paper

Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors

Shu-Ting Hsu, Thomas Klose, Christian Drabe, Harald Schenk

Proceedings Volume 6887, 688703 (2008) https://doi.org/10.1117/12.761617

KEYWORDS: Mirrors, Scanners, Projection systems, Etching, Prototyping, Silica, Photomasks, Semiconducting wafers, Actuators, Laser scanners

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Proceedings Article | 22 January 2007 Paper

A new micro laser camera

Christian Drabe, Richard James, Thomas Klose, Alexander Wolter, Harald Schenk, Hubert Lakner

Proceedings Volume 6466, 64660I (2007) https://doi.org/10.1117/12.700360

KEYWORDS: Mirrors, Cameras, Control systems, Scanners, Microelectromechanical systems, Laser development, Optical fibers, Video, Imaging systems, Semiconductor lasers

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Proceedings Article | 21 April 2006 Paper

A large deflection translatory actuator for optical path length modulation

Christian Drabe, Thomas Klose, Harald Schenk, Alexander Wolter, Hubert Lakner

Proceedings Volume 6186, 618604 (2006) https://doi.org/10.1117/12.662853

KEYWORDS: Protactinium, Mirrors, Actuators, Modulation, Micromirrors, Silicon, 3D modeling, Crystals, Microelectromechanical systems, Michelson interferometers

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Proceedings Article | 23 January 2006 Paper

Extended damping model for out-of-plane comb driven micromirrors

Thomas Klose, Thilo Sandner, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 61140J (2006) https://doi.org/10.1117/12.645981

KEYWORDS: Electrodes, Finite element methods, Micromirrors, 3D modeling, Capacitance, Mirrors, Electroluminescence, Data modeling, Microsystems, Microelectromechanical systems

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Proceedings Article | 23 January 2006 Paper

Scanning 2D micromirror with enhanced flatness at high frequency

Alexander Wolter, Thomas Klose, Shu-Ting Hsu, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 61140L (2006) https://doi.org/10.1117/12.654478

KEYWORDS: Mirrors, Micromirrors, Laser based displays, Laser scanners, Crystals, Silicon, Optical resolution, Microopto electromechanical systems, Electrodes, Optical simulations

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Proceedings Article | 16 August 2004 Paper

Damping analysis and measurement for a comb-drive scanning mirror

Thilo Sandner, Thomas Klose, Alexander Wolter, Harald Schenk, Hubert Lakner, Wyatt Davis

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.550529

KEYWORDS: Mirrors, Electrodes, Micromirrors, Scanners, Microelectromechanical systems, Motion models, Microfluidics, Crystals, Silicon, Capacitance

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Showing 5 of 7 publications

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