Thomas Klose
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Publications (7)

Proceedings Article | 19 February 2009 Paper
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Mirrors, Transformers, Sensors, Silicon, Resistance, Micromirrors, Bridges, Position sensors, Piezoresistive sensors, Wheatstone bridges

Proceedings Article | 8 February 2008 Paper
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Actuators, Mirrors, Silica, Etching, Scanners, Laser scanners, Projection systems, Photomasks, Semiconducting wafers, Prototyping

Proceedings Article | 22 January 2007 Paper
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Microelectromechanical systems, Optical fibers, Mirrors, Imaging systems, Cameras, Scanners, Video, Laser development, Control systems, Semiconductor lasers

Proceedings Article | 21 April 2006 Paper
Proc. SPIE. 6186, MEMS, MOEMS, and Micromachining II
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Modulation, Crystals, Silicon, 3D modeling, Micromirrors, Michelson interferometers, Protactinium

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Mirrors, Electrodes, Crystals, Silicon, Laser scanners, Microopto electromechanical systems, Micromirrors, Optical resolution, Optical simulations, Laser based displays

Showing 5 of 7 publications
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