Mr. Thomas Sebald Profile

Thomas Sebald

President

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 27 May 2010 Paper

Richard Tu, Thomas Sebald

Proceedings Volume 7748, 77481C (2010) https://doi.org/10.1117/12.866487

KEYWORDS: Reticles, Photomasks, Clocks, Quartz, Sensors, Glasses, Mask cleaning, Semiconducting wafers, Manufacturing equipment, Manufacturing

Proceedings Article | 11 December 2009 Paper

Richard Tu, Thomas Sebald

Proceedings Volume 7520, 752015 (2009) https://doi.org/10.1117/12.837039

KEYWORDS: Reticles, Quartz, Mask cleaning, Clocks, Photomasks, Sensors, Glasses, Ionization, Semiconducting wafers, Metrology

Proceedings Article | 11 May 2009 Paper

Thomas Sebald, Gavin Rider

Proceedings Volume 7379, 73791P (2009) https://doi.org/10.1117/12.824302

KEYWORDS: Reticles, Quartz, Control systems, Calibration, Semiconductors, Sensors, Glasses, Clocks, Data analysis, Capacitors

Proceedings Article | 17 October 2008 Paper

Thomas Sebald

Proceedings Volume 7122, 71220H (2008) https://doi.org/10.1117/12.801407

KEYWORDS: Reticles, Photomasks, Glasses, Capacitors, Manufacturing, Quartz, Electrodes, Metals, Measurement devices, Semiconductor manufacturing

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