Thomas T. Vu
at Top-Vu Technology Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 8 September 1995 Paper
Dennis Polla, P. Baude, Linda Pham, Q. Mei, J. Choi, Chian-Ping Ye, L. Francis, Tho Vu
Proceedings Volume 2552, (1995) https://doi.org/10.1117/12.218259
KEYWORDS: Thin films, Silicon, Silicon films, Sol-gels, Infrared detectors, Sensors, Polysomnography, Electrodes, Etching, Electronics

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