CONFERENCE PROCEEDINGS
Advanced Search
Thomas White
at Advanced Micro Devices Inc
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 11 March 2002 Paper
Establishing a cleaning process for attenuated phase-shift masks
Thomas White, Larry Watson, Chris Currington, Mary Ann Reyna
Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458338
KEYWORDS: Photomasks, Binary data, Metrology, Image processing algorithms and systems, Phase shifts, Deep ultraviolet, Inspection, Image segmentation, Manufacturing, Lithography
Proceedings Article | 30 December 1999 Paper
Proposed successor to barcode for automated reticle identification
Thomas White, Winthrop Baylies, Karl Bernal, John Merva, William Bouvier
Proceedings Volume 3873, (1999) https://doi.org/10.1117/12.373380
KEYWORDS: Reticles, Semiconducting wafers, Photomasks, Data modeling, Computer programming, Semiconductors, Robotics, Reflectivity, Patents, Standards development
Proceedings Article | 18 December 1998 Paper
Gaps in mask technology with respect to the National Technology Roadmap for Semiconductors
Wallace Carpenter, Kimberly Sadler, Thomas White
Proceedings Volume 3546, (1998) https://doi.org/10.1117/12.332843
KEYWORDS: Photomasks, Semiconductors, Semiconducting wafers, Lithography, Manufacturing, Yield improvement, Wafer manufacturing, Reticles, Instrument modeling, Lead
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top