In this paper the material ablation of polymers with a cascade of two laser pulses of different UV-wavelengths, exploiting the effects of the excited state absorption (ESA), is described. With a first vacuum ultraviolet (VUV) laser pulse with a wavelength of λ = 157 nm, the material is excited at low energy densities. A second, ultraviolet (UV) laser pulse, either λ = 193 nm or λ = 248 nm, is applied with a defined time delay between Δτ = 0 and 200 ns to the first pulse to induce the ablation process. Experiments have been carried out on polymethyl methacrylate (PMMA) and polytetrafluorethylene (PTFE). The effects on the ablation quality, ablation threshold and the ablation rate have been investigated. The focus has been set on the range of low energy densities, aiming for minimum ablation by each single laser pulse. By applying the multi wavelength pulse trains, the ablation quality can be improved, compared to the conventional UV laser machining of such materials. The machining of PMMA with a cascade of λ = 157 and λ = 248 nm does not show the material foaming, which can be observed when applying only λ = 248 nm laser pulses in the low energy regime. Applied on PTFE, the multi wavelength ablation shows improved results when using λ = 157 nm and λ = 193 nm, compared to the pure λ = 193 nm processing. The excited state increases the absorption of the UV laser light in the material, allowing a minimised ablation rate or higher depth resolution. This can be reduced down to the range of some nm (PMMA) or a few ten nm (PTFE). Besides the fluence, the time delay Δτ has been identified as a process parameter to vary the ablation rate. Also this dependency is qualitatively not unique for all wavelength, material and fluence combinations, but most of the experimental data point out an increased sensitivity for time delays between Δτ = 30 and Δτ = 60 ns. This sensitivity correlates with the time resolved temperature course on the surface, which is induced by the excitation pulse.
This paper deals with parameter optimization and online monitoring of laser spot welding (LSW). Using Nd:YAG laser, a wide range of experiments regarding the welding process have been carried out for both successful and failed welds. The typical failures appearing during packaging of surface mounted devices (SMDs) on flexible printed circuits (FPC) include gaps, a loss of connection between the welded components, and damage of the printed circuit boards. A flip-flop device called SO16 and lead frames as two components of widely used SMDs were packaged on FPCs in the experiments. The reproducibility of the weld quality for SO16 (FeNi) is greater than for lead frames (CuFe2P); this points out the difficulties appearing during copper or copper alloy welding. However, a correlation between the weld quality and the detected emission signals recorded during the weld process has been found for both components. The detected signals of the optical process emission for successful welds depict identical characterisics which are divided into three relevant signal phases. Changes in the signal characteristics, especially in these phases, imply information about the weld quality. While monitoring the welding processes for both components are possible, the detected signals for SO16 are less sensitive to process variations compared to those for lead frames. Based on spectral analysis, the intensity of the detected emission due to SO16 welding is slightly higher than the intensity due to lead frames welding.
The development of the recent years led to an increased importance of frequency-converted diode-pumped solid-state lasers (DPSSL) for industrial drilling, cutting and structuring applications. The UV laser systems show favorable beam absorption in a broad range of MEMS and MOEMS relevant materials like ceramics, metals and polymers. Their short pulses in the range of tH = 20 nanoseconds and the excellent beam quality offer the possibility of manufacturing with a minimum heat affected zone (HAZ) in the surrounding material and thereby a decreasing of initial fusing and debris. To obtain the reachable ablation quality, especially on metals, in this paper copper, tungsten, tantalum, molybdenum, nickel, iron, aluminum and titanium were machined under identical conditions. Material properties like heat conductivity, optical and thermal penetration depth, are decisive for the magnitude of the mentioned side-effects. The correlation of these physical values of different metals to those effects is the subject of this paper. Results of systematically accomplished experiences using a frequency tripled DPSSL with a wavelength of λ = 355 nm in order to investigate this correlation are presented. Due to thermal effects, the ablation quality of metals differ from each other extremely. These information enable a prediction of the reachable quality of the desired structure.
The precision machining of glass by laser ablation has been expanded with the short wavelength of the 157 nm of the F2 excimer laser. The high absorption of this wavelength in any optical glass, especially in UV-grade fused silica, offers a new approach to generate high quality surfaces, addressing also micro-optical components. In this paper, the machining of basic diffractive and refractive optical components and the required machining and process technology is presented. Applications that are addressed are cylindrical and rotational symmetrical micro lenses and diffractive optics like phase transmission grating and diffractive optical elements (DOEs). These optical surfaces have been machined into bulk material as well as on fiber end surfaces, to achieve compact (electro)-optical elements with high functionality and packaging density. The short wavelength of 157 nm used in the investigations require either vacuum or high purity inert gas environments. The influence of different ambient conditions is presented.
From the general trend towards higher functional integration and miniaturization results an increasing demand for metallic parts of smallest dimensions. Metal forming processes are best suited for these applications in terms of productivity and accuracy. But problems arise from the so called "size effects" related to these small dimensions, e.g. the influence of the microstructure becomes an important aspect to consider. An approach to these problems is the laser-assistance of the microforming process. Laser light is used to increase the temperature of the material during forming, reducing the flow stress and increasing the ductility. By controlling the temperature in the workpiece via laser radiation the microstructure can be modified by inducing recrystallization and thus increasing the formability in the required area of the part. This can also be verified by FEM simulations of the forming process. To enable the transmittance of laser light into the workpiece, sapphire tools are used. The machining of these tools has been carried out by laser ablation with wavelengths in the UV range, e.g. with excimer lasers. Experimental investigations have shown that the manufacturing of sapphire tools and their use in laser-assisted microforming processes is a suitable method for the mass production of microparts.
The precision machining of glass by laser ablation has been expanded with the short wavelength of the 157 nm of the F2 excimer laser. The high absorption of this wavelength in any optical glass, especially in UV-grade fused silica, offers a new approach to generate high quality surfaces, addressing also micro-optical components. In this paper, the machining of basic diffractive and refractive optical components and the required machining and process technology is presented. Applications that are addressed are cylindrical and rotational symmetrical micro lenses and diffractive optics like phase transmission grating and diffractive optical elements (DOEs). These optical surfaces have been machined into bulk material as well as on fiber end surfaces, to achieve compact (electro) -- optical elements with high functionality and packaging density. The short wavelength of 157 nm used in the investigations require either vacuum or high purity inert gas environments. The influence of different ambient conditions is presented.
μFor drilling fused silica, mechanical techniques like with diamond drills, ultrasonic machining, sand blasting or water jet machining are used. Also chemical techniques like laser assisted wet etching or thermal drilling with CO2-lasers are established. As an extension of these technologies, the drilling of micro-holes in fused silica with VUV laser radiation is presented here. The high absorption of the 157 nm radiation emitted by the F2 excimer laser and the short pulse duration lead to a material ablation with minimised impact on the surrounding material. Contrary to CO2-laser drilling, a molten and solidified phase around the bore can thus be avoided. The high photon energy of 7.9 eV requires either high purity nitrogen flushing or operation in vacuum, which also effects the processing results. Depending on the required precision, the laser can be used for percussion drilling as well as for excimer laser trepanning, by applying rotating masks. Rotating masks are especially used for high aspect ratio drilling with well defined edges and minimised debris. The technology is suitable particularly for holes with a diameter below 200 μm down to some microns in substrates with less than 200 μm thickness, that can not be achieved with mechanical methods. Drilling times in 200 μm fused silica substrates are in the range of ten seconds, which is sufficient to compete with conventional methods while providing similar or even better accuracy.
The F2 excimer laser emitting at 157 nm have been developed to reliable industrial machines applicable for micro-fabrication. Fluorine lasers are available at various power ratings, with energies between 1 mJ and more than 50 mJ and repetition rates up to 2 kHz. The applications of the F2 lasers presented here are mainly related to the micro-machining of glasses, with a special focus on fused silica. Depending on the applied fluence, fused silica can be processed with 157 nm by material ablation as well as by modifying the optical properties, when the energy density is beyond the ablation threshold. Both techniques qualify the 157 nm for manufacturing optical elements like planar wave guides or grating structures. Furthermore, the wavelength has been tested for micro-fluidic and micro-mechanical structures.
Increasing miniaturization and integration of multiple functions into portable electronic devices and sensors ask for smaller electrical components. Conventional abrasive processes often reach their technological limit resulting in the demand for alternative technologies with increased precision and performance. Lasers have been proven to be a suitable tool for micromachining, but often suffering the disadvantage of heat or shock affected zones around the machined structures. To be feasible as an industrial solution, new approaches have to provide very high precision and process stability with minimal collateral damage. Presently, two different approaches for laser machining of semiconductor materials are being investigated. Although the interaction mechanism is completely different as described within this paper, both are regarded as promising technologies: ultrashort-pulse and short wavelength laser machining. Femtosecond laser machining has been used for a variety of applications, showing the advantage of non-thermal ablation of many kinds of materials. Due to the short pulse duration and the high intensities multi-photon absorption allows to overcome the bandgap of semiconductors while not affecting the bulk material. Due to the short wavelength excimer lasers as well as fluorine lasers provide the general ability to generate small spot sizes and emit photons with higher energies compared to the bandgap of the material, e.g. of silicon. Both technologies will be discussed and compared, and applications for micromachining of silicon will be presented.
In this paper, a technology and a machine tool is presented, which can be implemented in the production of Liquid Crystal Displays (LCDs), leading to a higher flexibility and reduced manufacturing costs. The developed technology focuses on the generation of transfer points by selective removal of polyimide on an Indium Tin Oxide layer with UV-laser radiation, thus replacing the conventional stamping method with cliches. With the combination of xy-stages and galvanometer scanner beam deflection, panels with dimensions of up to 400 by 500 mm2 can be processed. On test panels, the required 2000 transfer points, distribute on the entire panel, can be processed in step and scan mode in about 30 s with an accuracy of better than 20 micrometers . The yield of the new technology in terms of working displays is comparable to the current technology. Besides LCD production, the developed machine tool has a high potential in the field of micro and precision engineering on large scale panels. The machine is highly versatile and can be used to perform a wide variety of processes in organic and inorganic materials for volume production as well as for research.
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